Semiconductor package structure for improving die warpage and manufacturing method thereof
View Patent ↗A semiconductor die package includes a semiconductor die, a film for improving die warpage bonded to a first face of the semiconductor die, a plurality of electrically conductive bumps formed on a second face of the semiconductor die, a substrate onto which the electrically conductive bumps of the second face of the semiconductor die are bonded to electrically connect the semiconductor die and the substrate, and a mold compound applied these components to form an exposed surface of the semiconductor die package that is coplanar with an exposed surface of the film.
1. A semiconductor device, comprising:
a substrate comprising a substrate top side;
a semiconductor die comprising a die top side, a die bottom side opposite the die top side, and a die lateral side joining the die top side to the die bottom side;
conductive elements on the die bottom side that:
bond the die bottom side to the substrate top side; and
electrically interconnect circuitry of the semiconductor die to the substrate;
an adhesive layer covering the die top side, wherein the adhesive layer comprises an adhesive top side, an adhesive bottom side opposite the adhesive top side, and an adhesive lateral side joining the adhesive top side to the adhesive bottom side;
interconnects on the substrate top side, wherein each interconnect has a horizontal line of symmetry; and
a mold compound comprising a mold top side and a mold bottom side opposite the mold top side;
wherein the mold bottom side directly contacts the substrate top side; and
wherein the mold compound:
directly contacts and covers the adhesive lateral side; and
encompasses the interconnects such that a top side of each interconnect does not extend beyond the mold top side and is exposed through the mold top side.
2. The semiconductor device of claim 1 , wherein:
the adhesive top side provides a single planar side; and
the mold top side is coplanar with the single planar side of the adhesive top side.
3. The semiconductor device of claim 1 , wherein:
the adhesive top side and the mold top side define a top, external side of the semiconductor device;
the substrate comprises a substrate bottom side opposite the substrate top side; and
the substrate bottom side defines a bottom, external side of the semiconductor device.
4. The semiconductor device of claim 1 , wherein the adhesive lateral side extends from an interface with the die lateral side to an interface with the mold top side.
5. The semiconductor device of claim 1 , wherein a height of the top side of each interconnect is less than a height of the die top side above the substrate top side.