Electroplating composition and electroplating method
The present invention relates to a electroplating composition and an electroplating method using the same. The electroplating composition of the present invention comprising a first leveling agent and a second leveling agent, wherein the first leveling agent and the second leveling agent each, independently, comprise a compound represented by Chemical Formula 1 below:
1. An electroplating composition comprising:
a first leveling agent and a second leveling agent,
wherein the first leveling agent is a compound represented by Chemical Formula 2, and the second leveling agent is one selected from the compounds represented by Chemical Formulas 3 to 5 below,
wherein the weight ratio of the first leveling agent to the second leveling agent is 3:7 to 7:3
2. The electroplating composition of claim 1 , wherein the amount of the leveling agents is 0.1 g/L to 10 g/L.
3. The electroplating composition of claim 1 , further comprising a metal ion source and an electrolyte.
4. The electroplating composition of claim 3 , wherein the metal ion source is at least one selected from the group consisting of copper sulfate, copper chloride, copper acetate, copper citrate, copper nitrate, copper fluoroborate, copper methane sulfonate, copper phenyl sulfonate and copper p-toluene sulfonate.
5. The electroplating composition of claim 3 , wherein the electrolyte is at least one selected from the group consisting of sulfuric acid, acetic acid, fluoroboric acid, methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, trifluoromethanesulfonic acid, benzenesulfonic acid, p-toluenesulfonic acid, sulfamic acid, hydrochloric acid, hydrobromic acid, perchloric acid, nitric acid, chromic acid, and phosphoric acid.
6. The electroplating composition of claim 3 , wherein the metal ion source supplies a monovalent metal cation, a divalent metal cation, or a mixture thereof.
7. The electroplating composition of claim 6 , wherein the metal ion source is at least one selected from the group consisting of sulfates, halides, acetates, citrates, borates, and sulfonates.
8. The electroplating composition of claim 1 , further comprising at least one of an accelerator and a suppressor.
9. The electroplating composition of claim 8 , wherein an amount of the accelerator is 0.0001 g/L to 0.02 g/L based on the volume of the electroplating composition.
10. The electroplating composition of claim 8 , wherein an amount of the suppressor is 0.01 g/L to 1 g/L based on the volume of the electroplating composition.