IP Library Granted Patent US 11,037,896
Granted Patent B2
US 11,037,896 · App. 16/216,881 · Granted Jun 15, 2021

Method and apparatus for forming backside die planar devices and saw filter

Inventors: Kevin J. Lee (Beaverton, OR); Ruchir Saraswat (Swindon, GB); Uwe Zillmann (Braunschweig, DE); Nicholas P. Cowley (Wroughton, GB); Richard J. Goldman (Cirencester, GB)
Assignee: Intel Corporation
H01L24/09G06F1/16H01F27/2804H01L23/481H01L23/5226H01L23/5227H01L23/645H01L23/66H01L24/17H03H7/42H03H9/64H01L23/525H01L24/05H01L24/06H01L24/13H01L24/16H01L2223/6616H01L2223/6661H01L2223/6677H01L2224/0233H01L2224/02372H01L2224/02375H01L2224/02379H01L2224/0401H01L2224/05548H01L2224/16146H01L2224/16225H01L2224/17181
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Quick Facts
Patent No.
US 11,037,896
App. No.
16/216,881
Granted
Jun 15, 2021
Kind
B2
Abstract

Described is an apparatus which comprises: a backside of a first die having a redistribution layer (RDL); and one or more passive planar devices disposed on the backside, the one or more passive planar devices formed in the RDL.

Claims (41)

1. An apparatus comprising:

a die having a back-side and a front-side, wherein the back-side of the die includes one or more passive devices in or on a redistribution layer (RDL), wherein the front-side of the die includes one or more active devices, and wherein the one or more passive devices are positioned in one or more regions in or on the RDL;

bumps directly coupled to the one or more passive devices;

a first layer including piezoelectric material, wherein the layer is adjacent to the one or more passive devices; and

a second layer including passivation material, wherein the second layer is adjacent to the first layer.

2. The apparatus of claim 1 , wherein the die is a first die, and wherein the apparatus comprises a second die coupled to the first die.

3. The apparatus of claim 2 , wherein the second die is coupled to the first die via the back-side of the first die.

4. The apparatus of claim 1 , wherein the one or more passive planar devices is one or more of: a SAW filter; a capacitive gap stripline band-pass filter; a stripline inter-digital filter; a stripline hairpin filter; a stripline stub filter fractal-shape microstrip filter; a stepped-impedance filter; a stepped-impedance filter with a shunt resonator; a butterfly stub; double stubs, a radial stub, paralleled radial stubs, a clover-leaf stub; a short-circuit stud; an open-circuit stub; a coplanar waveguide; a microstrip antenna; or stripline slot antenna.

5. The apparatus of claim 1 , wherein the one or more active devices include a low noise amplifier.

6. The apparatus of claim 1 , further comprising one or more vias to couple the one or more active devices with the one or more passive devices.

7. An apparatus comprising:

a die having a back-side and a front-side, wherein the back-side of the die includes:

a receiver SAW filter in or on a redistribution layer (RDL);

a transmitter SAW filter in or on the RDL; and

an antenna in or on the RDL,

and wherein the front-side of the die includes:

a low noise amplifier (LNA) coupled to the receiver SAW filter; and

a power amplifier (PA) coupled to the transmitter SAW filter; and

one or more vias coupled to the back-side and the front-side of the die.

8. The apparatus of claim 7 , wherein the back-side of the die includes a Bragg Reflector.

9. The apparatus of claim 8 , further comprising a layer including piezoelectric material, wherein the layer is adjacent to the SAW filter.

10. The apparatus of claim 9 , wherein the layer is a first layer, wherein the apparatus further comprises a second layer including passivation material, and wherein the second layer is adjacent to the first layer.

11. The apparatus of claim 7 , wherein the back-side of the die includes:

a receiver interstage SAW filter coupled to an output of the LNA; and

a transmitter interstage SAW filter coupled in an input of the PA.

12. The apparatus of claim 11 , wherein the front-side of the die includes:

a first mixer coupled to the receiver interstage SAW filter;

a second mixer coupled to the transmitter interstage SAW filter; and

a voltage controlled oscillator (VCO) coupled to the first mixer and the second mixer.

13. The apparatus of claim 7 , wherein the die is a first die, and wherein the apparatus comprises a second die coupled to the first die.

14. The apparatus of claim 13 , wherein the second die is coupled to the first die via the back-side of the first die.

15. The apparatus of claim 13 , wherein the second die comprises a baseband digital signal processor.

16. A system comprising:

a memory;

a processor coupled to the memory, wherein the processor includes:

a die having a back-side and a front-side, wherein the back-side of the die includes one or more passive devices in or on a redistribution layer (RDL), wherein the front-side of the die includes one or more active devices, and wherein the one or more passive devices are positioned in one or more regions in or on the RDL; and

bumps coupled to the one of more passive devices; and a display communicatively coupled to the processor;

a first layer including piezoelectric material, wherein the layer is adjacent to the one or more passive devices; and

a second layer including passivation material, wherein the second layer is adjacent to the first layer.

17. The system of claim 16 , wherein the die is a first die, and wherein the apparatus comprises a second die coupled to the first die.

18. The system of claim 17 , wherein the second die is coupled to the first die via the back-side of the first die.

Continuity (2)
Continuation 15323521
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