Photovoltaic cell with passivating contact
A semiconductor substrate ( 1 ) having an active region ( 2 ) and a first surface and a second surface facing each other. A first type of passivating layer ( 5 ) is present for providing an electrical contact of a first conductivity type on a part of the first surface of the semiconductor substrate ( 1 ). A dielectric layer ( 4 ) is provided between the first type of passivating layer ( 5 ) and an active region ( 2 ) of the semiconductor substrate ( 1 ). Doping of the first conductivity type is provided in a layer ( 3 ) of the active region ( 2 ) of the semiconductor substrate ( 1 ) near the first surface. The lateral dopant level in the layer ( 3 ) of the active region ( 2 ) near the first surface is substantially uniform.
1. A semiconductor substrate having an active region and a first surface and a second surface facing each other, comprising a first type of passivating layer for providing an electrical contact of a first conductivity type only on a part of the first surface of the semiconductor substrate,
wherein a dielectric layer is provided between the first type of passivating layer and the active region of the semiconductor substrate, and
wherein doping of the first conductivity type is provided in a layer of the active region of the semiconductor substrate near the first surface, aligned with the first type of passivating layer, and wherein a lateral dopant level in the layer of the active region near the first surface has a generally uniform character,
wherein a thickness and/or integrated dopant concentration per unit area of the layer of the active region near the first surface is smaller in first areas of the layer vertically corresponding to the first type of passivating layer than in second areas of the layer vertically corresponding to areas between the first type of passivating layer.
2. The semiconductor substrate according to claim 1 , wherein the first type of passivating layer comprises a grid pattern distributed over the first surface.
3. The semiconductor substrate according to claim 1 , wherein a dopant of the first conductivity type is further present in the dielectric layer.
4. The semiconductor substrate according to claim 1 , further comprising a second type of passivating layer for providing an electrical contact of a second conductivity type, opposite to the first conductivity type, on the second surface of the semiconductor substrate,
wherein a dielectric layer is provided between the second type of passivating layer and the active region of the semiconductor substrate.
5. The semiconductor substrate according to claim 1 , further comprising a second type of passivating layer for providing an electrical contact of a second conductivity type, opposite to the first conductivity type, on a part of the second surface of the semiconductor substrate,
wherein a dielectric layer is provided between the second type of passivating layer and the active region of the semiconductor substrate, and
wherein doping of the second conductivity type is provided in a layer of the active region of the semiconductor substrate near the second surface, aligned with the second type of passivating layer.
6. The semiconductor substrate according to claim 5 , wherein the second type of passivating layer comprises a grid pattern distributed over the second surface.
7. The semiconductor substrate according to claim 5 , wherein a lateral dopant level in the layer of the active region near the second surface has a generally uniform character.
8. The semiconductor substrate according to claim 5 , wherein a thickness or integrated dopant concentration per unit area of the layer of the active region near the second surface is smaller in first areas of the layer vertically corresponding to the second type of passivating layer than in second areas of the layer vertically corresponding to areas between the second type of passivating layer.
9. The semiconductor substrate according to claim 5 , wherein a dopant of the second conductivity type is further present in the dielectric layer adjacent to the second type of passivating layer.