Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support
A substrate processing apparatus includes: a reaction tube configured to accommodate a substrate holder holding a plurality of substrates and process a substrate held on the substrate holder; a heating unit installed outside the reaction tube and configured to heat an inside of the reaction tube; a protection tube installed to extend in a vertical direction in contact with an outer wall of the reaction tube; an insulating tube disposed inside the protection tube and having through-holes extending in a vertical direction; a thermocouple having a thermocouple junction provided at an upper end thereof, and thermocouple wires joined at the thermocouple junction and inserted into the through-holes of the insulating tube; a gas supply unit configured to supply a gas, for processing a substrate accommodated in the reaction tube, into the reaction tube; and an exhaust unit configured to exhaust a gas from the reaction tube.
1. An assembly for a substrate processing apparatus, the assembly comprising:
a reaction tube, having a substantially cylindrical shape for accommodating a substrate holder in a vertical direction, the substrate holder holding a plurality of substrate, each substrate being in a horizontal posture and stacked vertically;
an insulating tube including a support portion for supporting a thermocouple junction, the thermocouple junction being connected to a pair of thermocouple wires, and a pair of through-holes that accommodate the pair of thermocouple wires therein vertically; and
a thermocouple protection, mechanically fixed to an outer side surface of the reaction tube in the vertical direction, the thermocouple protection having a shape for covering a part of the insulating tube, an inner diameter of the space being smaller than a diameter of the outer side surface of the reaction tube.
2. The assembly according to claim 1 ,
wherein the thermocouple protection is formed of quarts, mechanically fixed to the outer side surface of the reaction tube being formed of quartz.
3. The assembly according to claim 1 ,
wherein the thermocouple protection having a cross section of a semicircular tubular shape for covering a part of the insulating tube, an inner diameter of the space being smaller than a diameter of the outer side surface of the reaction tube.
4. An assembly for a substrate processing apparatus, the assembly comprising:
a reaction tube, having a substantially cylindrical shape for accommodating a substrate holder in a vertical direction, the substrate holder holding a plurality of substrate, each substrate being in a horizontal posture and stacked vertically;
a first insulating tube including a first support portion for supporting a first thermocouple junction, the first thermocouple junction being connected to a first pair of thermocouple wires, and a first pair of through-holes that accommodate the first pair of thermocouple wires therein vertically;
a first thermocouple protection, mechanically fixed to a first outer side surface of the reaction tube in the vertical direction, the first thermocouple protection having a first shape for covering a first part of the first insulating tube, a first inner diameter of the first space being smaller than a diameter of the outer side surface of the reaction tube;
a second insulating tube including a second support portion for supporting a second thermocouple junction, the second thermocouple junction being connected to a second pair of thermocouple wires, and a second pair of through-holes that accommodate the second pair of thermocouple wires therein vertically; and
a second thermocouple protection, mechanically fixed to a second outer side surface of the reaction tube in the vertical direction, the second thermocouple protection having a second shape for covering a second part of the second insulating tube, a second inner diameter of the second space being smaller than a diameter of the outer side surface of the reaction tube.
5. The assembly according to claim 4 ,
wherein a first height of the first thermocouple junction is different from a second height of the second thermocouple junction.
6. The assembly according to claim 5 ,
wherein a first vertical length of the first thermocouple protection is different from a second vertical length of the second thermocouple protection.
7. The assembly according to claim 5 ,
wherein a first thickness of a first wall portion of the first thermocouple protection is different from a second thickness of a second wall portion of the second thermocouple protection.
8. The assembly according to claim 5 ,
wherein a first thermal capacity of the first thermocouple protection is different from a second thermal capacity of the second thermocouple protection.