Silicon carbide semiconductor device
A first portion of the poly-silicon layer is provided on a first face of a front surface of a semiconductor substrate via a gate insulating film in an edge termination region and configures a gate runner. The first portion opposes an edge p ++ -type contact region in a depth direction Z. A chip-end-side edge of the first portion is positioned within a plane of the edge p ++ -type contact region. A field oxide film disposed separated from the poly-silicon layer, extends from a chip end toward a chip center and, on the first face, terminates closer to the chip end than does the first portion. The entire surface of the poly-silicon layer is flat, free of a step due to the field oxide film. A chip-center-side edge of the field oxide film is closer to the chip end than is the edge p ++ -type contact region and positioned on a p-type base region.
1. A silicon carbide semiconductor device, comprising:
an active region;
a termination region provided at a periphery of the active region;
a semiconductor substrate containing silicon carbide;
an insulated gate structure provided at a front surface side of the semiconductor substrate, the insulated gate structure being provided in the active region and including a metal oxide semiconductor field effect transistor formed by a 3-layer structure of a metal, an oxide film and a semiconductor, the semiconductor substrate including
a first-conductivity-type semiconductor layer, configuring a drift region of the metal oxide semiconductor field effect transistor, and
a second-conductivity-type semiconductor layer provided at the front surface side of the semiconductor substrate, and on the first-conductivity-type semiconductor layer, the second-conductivity-type semiconductor layer configuring a base region of the metal oxide semiconductor field effect transistor;
a trench provided at the front surface side of the semiconductor substrate and extending in a first direction parallel to a front surface of the semiconductor substrate;
an insulating film provided at the front surface side of the semiconductor substrate,
a gate electrode of the metal oxide semiconductor field effect transistor provided in the trench via the insulating film;
a second-conductivity-type high-concentration region, provided in a surface region at the front surface side of the semiconductor substrate in the termination region, the second-conductivity-type high-concentration region forming a second-conductivity-type junction with the second-conductivity-type semiconductor layer, the second-conductivity-type high-concentration region having an impurity concentration higher than an impurity concentration of the second-conductivity-type semiconductor layer;
a first gate poly-silicon layer provided on the front surface of the semiconductor substrate in the termination region via the insulating film, and facing the second-conductivity-type high-concentration region via the insulating film in a depth direction, the first gate poly-silicon layer surrounding the periphery of the active region, and having a rectangular ring shape, the first gate poly-silicon layer being electrically connected to the gate electrode at an end of the trench; and
a field oxide film provided on the front surface of the semiconductor substrate in the termination region via the insulating film, the field oxide film surrounding a periphery of the first gate poly-silicon layer, and having a rectangular ring shape with four side parts, two of which extend in the first direction and the other two of which extend in a second direction orthogonal to the first direction, wherein
at least one side part of the field oxide film that extends in the second direction is disposed from an outer periphery of the termination region toward the active region in the first direction, a closest edge to the active region of the at least one side part is located at a position further from the active region than is a position of a furthest edge from the active region of the first gate poly-silicon layer.
2. The silicon carbide semiconductor device according to claim 1 , wherein
at least one side part of the field oxide film that extends in the first direction is disposed from the outer periphery of the termination region toward the active region in the second direction, a closest edge to the active region of the at least one side part extending in the first direction is located at a same position as a closest edge from the active region of the first gate poly-silicon layer.
3. The silicon carbide semiconductor device according to claim 2 , wherein
the at least one side part includes the two side parts of the field oxide film that extend in the first direction and are each disposed from the outer periphery of the termination region toward the active region in the second direction, a closest edge to the active region of each of the two side parts extending in the first direction is located to the same position as the closest edge from the active region of the first gate poly-silicon layer.
4. The silicon carbide semiconductor device according to claim 1 , wherein
a furthest edge from the active region of the second-conductivity-type high-concentration region is located at a position closer to the active region than is a position of a furthest edge from the active region of the second-conductivity-type semiconductor layer, and
in at least two side parts of the field oxide film that extend in the second direction, a closest edge to the active region of each of the two side parts extending in the second direction is located on the second-conductivity-type semiconductor layer via the insulating film in the depth direction, and is located further from the active region than is a position of the second-conductivity-type junction.
5. The silicon carbide semiconductor device according to claim 1 , wherein
an outer side edge of the first gate poly-silicon layer is positioned within a plane area of the second-conductivity-type high-concentration region.
6. The silicon carbide semiconductor device according to claim 1 , wherein
an entire surface of the first gate poly-silicon layer is flat.
7. The silicon carbide semiconductor device according to claim 1 , further comprising:
a second gate poly-silicon layer connected to the first gate poly-silicon layer, and being provided on the front surface of the semiconductor substrate via the insulating film in the active region; and
a gate pad provided on the second gate poly-silicon layer via an interlayer insulating film, and being electrically connected to the second gate poly-silicon layer, wherein
a region between the front surface of the semiconductor substrate and the second gate poly-silicon layer is free of the field oxide film.
8. The silicon carbide semiconductor device according to claim 1 , wherein
the insulating film is a high temperature oxide film or a thermal oxide film,
the field oxide film is a silicon oxide film, and
field oxide film having a thickness greater than a thickness of the insulating film.