Nozzle for uniform plasma processing
A nozzle for uniform plasma processing comprises an inlet portion and an outlet portion. The inlet portion has a side surface substantially parallel to a vertical axis. The inlet portion comprises a plurality of gas channels. The outlet portion is coupled to the inlet portion. The outlet portion comprises a plurality of outlets. At least one of the outlets is at an angle other than a right angle relative to the vertical axis.
1. An apparatus for uniform plasma processing comprising:
a nozzle comprising:
an inlet portion comprising a plurality of gas channels, the inlet portion having a side surface substantially parallel to a vertical axis;
a cavity below the plurality of gas channels; and
an outlet portion below the cavity, wherein the outlet portion comprises a plurality of outlets, wherein at least one of the outlets is at an angle other than a right angle relative to the vertical axis, and wherein the outlet portion has a concave shape; and
a support feature in the cavity between the inlet portion and the outlet portion.
2. The apparatus of claim 1 , wherein at least one of the gas channels extends at an angle relative to the vertical axis.
3. The apparatus of claim 1 , wherein the number of outlets is greater than the number of gas channels.
4. The apparatus of claim 1 , wherein the outlet portion comprises at least one step.
5. The apparatus of claim 1 , wherein the outlet portion comprises a side surface that extends at an angle to the vertical axis.
6. A plasma processing system comprising:
a processing chamber comprising a pedestal to hold a workpiece comprising a substrate;
a plasma source;
a nozzle coupled to the plasma source to receive a gas to generate plasma in the processing chamber, wherein the nozzle comprises an inlet portion comprising a plurality of gas channels, the inlet portion comprises a side surface substantially parallel to a vertical axis, a cavity below the plurality of gas channels;
an outlet portion below the cavity, the outlet portion comprising a plurality of outlets, wherein at least one of the outlets is at an angle other than a right angle relative to the vertical axis, and wherein the outlet portion has a concave shape; and
a support feature in the cavity between the inlet portion and the outlet portion.
7. The system of claim 6 , wherein at least one of the gas channels extends at an angle relative to the vertical axis.
8. The system of claim 6 , wherein the number of outlets is greater than the number of gas channels.
9. The system of claim 6 , wherein the outlet portion comprises at least one step.
10. The system of claim 6 , wherein the outlet portion comprises a side surface that extends at an angle to the vertical axis.