IP Library › Granted Patent US 11,056,528
Granted Patent B2
US 11,056,528 · App. 16/341,899 · Granted Jul 6, 2021

Image sensor with phase-sensitive pixels

Inventors: Andras Pattantyus-Abraham (Menlo Park, CA); Nikolai E. Bock (San Jose, CA); Emanuele Mandelli (Mountain View, CA)
Assignee: INVISAGE TECHNOLOGIES, INC.
H01L27/14665H01L27/14612H01L27/14614H04N5/374
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Quick Facts
Patent No.
US 11,056,528
App. No.
16/341,899
Granted
Jul 6, 2021
Kind
B2
Abstract

Imaging apparatus ( 100, 200 ) includes a photosensitive medium ( 302 ) configured to convert incident photons into charge carriers. A bias electrode ( 304 ) overlies the photosensitive medium and applies a bias potential to the photosensitive medium. One or more pixel circuits ( 306 ) are formed on a semiconductor substrate. Each pixel circuit defines a respective pixel ( 300 ) and includes first and second pixel electrodes ( 316, 318 ) coupled to collect the charge carriers from the photosensitive medium at respective first and second locations, and first and second transfer gates ( 326, 328 ) in respective proximity to the first and second pixel electrodes. Circuitry ( 700 ) is coupled to apply different, respective first and second potentials to the first and second transfer gates and to vary the first and second potentials so as to control relative proportions of the charge carriers that are collected by the first and second electrodes.

Claims (44)

1. Imaging apparatus, comprising:

a photosensitive medium, comprising a quantum film, which has a first charge mobility and is configured to convert incident photons into charge carriers;

a non-conductive layer having a second charge mobility, higher than the first charge mobility;

a bias electrode, which is at least partially transparent, overlying the photosensitive medium and configured to apply a bias potential to the photosensitive medium; and

one or more pixel circuits formed on a semiconductor substrate, each pixel circuit defining a respective pixel and comprising:

first and second pixel electrodes coupled to collect the charge carriers from the photosensitive medium at respective first and second locations, which are spaced apart across the pixel,

wherein the non-conductive layer is disposed between the quantum film and the first and second pixel electrodes;

first and second transfer gates in respective proximity to the first and second pixel electrodes; and

circuitry coupled to apply different, respective first and second potentials to the first and second transfer gates and to vary the first and second potentials so as to control relative proportions of the charge carriers that are collected by the first and second electrodes.

2. The apparatus according to claim 1 , wherein the pixel circuit comprises a photogate between the first and second transfer gates in proximity to the photosensitive medium, and wherein the circuitry is configured to bias the photogate in order to facilitate transfer of the charge carriers to the first and second pixel electrodes.

3. The apparatus according to claim 1 , wherein the pixel circuit comprises readout circuitry, which is configured to output first and second signals responsively to the charge carriers collected respectively by the first and second pixel electrodes.

4. The apparatus according to claim 3 , and comprising:

an illumination source, which is configured to output pulses of radiation having a specified pulse duration; and

control circuitry, which is configured to drive the one or more pixel circuits in synchronization with the pulses of the radiation to sequentially apply first and second control pulses, having the specified pulse duration, to the first and second transfer gates, respectively, and to compare the first and second signals that are output in response to the first and second control pulses in order to estimate a time of flight of the radiation.

5. The apparatus according to claim 4 , wherein the one or more pixel circuits define multiple pixels arranged in rows and columns of an array, and wherein the control circuitry is configured to apply the estimated time of flight over the array in order to construct a depth map of an object irradiated by the illumination source.

6. Imaging apparatus, comprising:

an illumination source, which is configured to output modulated radiation; and

an image sensor, comprising:

a photosensitive medium configured to convert incident photons into charge carriers;

at least one bias electrode, which is at least partially transparent, overlying the photosensitive medium; and

an array of pixel circuits formed on a semiconductor substrate, each pixel circuit defining a respective pixel and comprising a pixel electrode coupled to collect the charge carriers from the photosensitive medium and readout circuitry configured to output a signal responsively to the charge carriers collected by the pixel electrode; and

control circuitry, which is coupled to apply to the at least one bias electrode a potential that is modulated in synchronization with the modulated radiation and causes the voltage between the at least one bias electrode and the at least one pixel electrode to vary periodically between positive and negative values.

7. The apparatus according to claim 6 , wherein the readout circuitry is configured, in each of a sequence of image frames, to generate the signal in response to the charge carriers accumulated by the at least one pixel electrode over one or more full periods of the modulated potential.

8. The apparatus according to claim 6 , wherein the photosensitive medium comprises a quantum film.

9. The apparatus according to claim 6 , wherein the control circuitry is configured to drive both the illumination source and the at least one bias electrode with an identical modulation pattern.

10. The apparatus according to claim 6 , wherein the at least one bias electrode comprises first and second bias electrodes, which overlie different, respective first and second areas of the photosensitive medium,

wherein the control circuitry is configured to apply a modulation pattern with different, respective first and second phases to the first and second bias electrodes, and

wherein the pixel circuits comprise at least first and second pixel circuits, which are configured to collect the charge carriers from the first and second areas of the photosensitive medium.

11. The apparatus according to claim 10 , wherein the first and second phases are 180° apart.

12. The apparatus according to claim 10 , wherein the control circuitry is configured to compare the signals that are output by the first and second pixel circuits in order to estimate a time of flight of the radiation.

13. A method for imaging, comprising:

overlaying a bias electrode, which is at least partially transparent, on a photosensitive medium configured to convert incident photons into charge carriers, wherein the photosensitive medium comprises a quantum film, which has a first charge mobility;

coupling one or more pixel circuits to the photosensitive medium, each pixel circuit defining a respective pixel and comprising first and second pixel electrodes configured to collect the charge carriers from the photosensitive medium at respective first and second locations, which are spaced apart across the pixel, and first and second transfer gates in respective proximity to the first and second pixel electrodes;

disposing a non-conductive layer, having a second charge mobility, higher than the first charge mobility, between the quantum film and the first and second pixel electrodes; and

applying different, respective first and second potentials to the first and second transfer gates and varying the first and second potentials so as to control relative proportions of the charge carriers that are collected by the first and second electrodes.

14. The method according to claim 13 , and comprising outputting first and second signals responsively to the charge carriers collected respectively by the first and second pixel electrodes.

15. The method according to claim 14 , and comprising directing pulses of radiation having a specified pulse duration toward a target,

wherein applying the different, respective first and second potentials comprises driving the one or more pixel circuits in synchronization with the pulses of the radiation to sequentially apply first and second control pulses, having the specified pulse duration, to the first and second transfer gates, respectively, and

wherein the method comprises comparing the first and second signals that are output in response to the first and second control pulses in order to estimate a time of flight of the radiation.

16. The method according to claim 15 , wherein the one or more pixel circuits define multiple pixels arranged in rows and columns of an array, and wherein the method comprises applying the estimated time of flight over the array in order to construct a depth map of an object irradiated by the illumination source.

17. A method for imaging, comprising:

driving an illumination source to output modulated radiation;

sensing the radiation using an image sensor, which comprises a photosensitive medium configured to convert incident photons into charge carriers, at least one bias electrode, which is at least partially transparent, overlying the photosensitive medium, and an array of pixel circuits, each pixel circuit defining a respective pixel, which are coupled to collect the charge carriers from the photosensitive medium and to output a signal responsively to the collected charge carriers; and

applying to the at least one bias electrode a potential that is modulated in synchronization with the modulated radiation and causes the voltage between the at least one bias electrode and the at least one pixel electrode to vary periodically between positive and negative values.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2019
From: PATTANTYUS-ABRAHAM, ANDRAS; BOCK, NIKOLAI E.; MANDELLI, EMANUELE
To: INVISAGE TECHNOLOGIES, INC.
Reel/Frame 048879/0749 →
Continuity (2)
Provisional Application 62411910 · Oct 24, 2016
Related Publication 20190252455A1 · Aug 15, 2019