Apparatus, system and method for providing an end effector
The disclosure provides an apparatus, system and method for providing an end effector. The end effector may be capable of accommodating semiconductor wafers of varying sizes, and may include: a wafer support; a bearing arm capable of interfacing with at least one robotic element, and at least partially bearing the wafer support at one end thereof; a plurality of support pads on the wafer support for physically interfacing with a one of the semiconductor wafers; and a low friction moving clamp driven bi-directionally along a plane at least partially provided by the bearing arm, wherein the low friction moving clamp retractably applies force to a proximal edge of the semiconductor wafer.
1. An end effector, comprising:
a wafer support;
a bearing arm capable of interfacing with at least one robotic element, and at least partially bearing the wafer support at one end thereof;
a plurality of proximal and distal support pads on the wafer support for physically interfacing with a semiconductor wafer, wherein at least the distal support pads are ridged with a heightened feature to provide a wafer-edge stop at a most distal portion thereof; and
a low friction moving clamp comprising two canted rollers and driven bi-directionally along a plane at least partially provided by the bearing arm, wherein the low friction moving clamp retractably forces against a proximal edge of the semiconductor wafer to cause the physical interfacing of the semiconductor wafer with at least a lower feature of the ridges on the plurality of distal support pads.
2. The end effector of claim 1 , wherein the wafer support comprises a fork.
3. The end effector of claim 1 , wherein the low friction clamp enables accommodation of varying sizes of wafers comprising at least 200 mm and 300 mm.
4. The end effector of claim 1 , wherein the bi-directional drive comprises at least a moving clamp motor.
5. The end effector of claim 4 , further comprising a low friction vacuum cylinder engaged for the moving clamp motor.
6. The end effector of claim 5 , wherein the vacuum cylinder provides low clamping forces from the low friction moving clamp.
7. The end effector of claim 4 , further comprising at least one retract stop that stops retraction of the low friction moving clamp after actuation of the low friction moving clamp by the bi-directional drive.
8. The end effector of claim 4 , further comprising at least one travel stop that stops travel of the low friction moving clamp upon actuation by the bi-directional drive.
9. The end effector of claim 1 , wherein the wafer support further comprises at least one vacuum eyelet for gripping the semiconductor wafer.
10. The end effector of claim 1 , wherein the wafer support further comprises a fiber optic wafer presence sensor.
11. The end effector of claim 1 , wherein the lower feature of the ridges is angled.
12. The end effector of claim 1 , wherein the heightened feature of the ridges is angled.
13. An end effector, comprising:
a wafer support;
a bearing arm capable of interfacing with at least one robotic element, and at least partially bearing the wafer support at one end thereof;
a plurality of proximal and distal support pads on the wafer support for physically interfacing with a semiconductor wafer, wherein at least the distal support pads are ridged with a heightened feature to provide a wafer-edge stop at a most distal portion thereof; and
a low friction moving clamp driven bi-directionally by a moving clamp motor along a plane at least partially provided by the bearing arm, wherein the low friction moving clamp retractably forces against a proximal edge of the semiconductor wafer to cause the physical interfacing of the semiconductor wafer with at least a lower feature of the ridges on the plurality of distal support pads; and
at least one retract vacuum operated stop comprising a button that stops retraction of the low friction moving clamp after actuation of the low friction moving clamp by the bi-directional drive.