Selective deposition of aluminum oxide on metal surfaces
Processing methods for depositing aluminum etch stop layers comprise positioning a substrate within a processing chamber, wherein the substrate comprises a metal surface and a dielectric surface; exposing the substrate to an aluminum precursor gas comprising an isopropoxide based aluminum precursor to selectively form an aluminum oxide (AlOx) etch stop layer onto the metal surface while leaving exposed the dielectric surface during a chemical vapor deposition process. The metal surfaces may be copper, cobalt, or tungsten.
1. A processing method comprising:
positioning a substrate within a processing chamber, wherein the substrate comprises a metal surface and a dielectric surface;
exposing the substrate to a first process condition comprising an aluminum precursor gas comprising an isopropoxide based aluminum precursor;
exposing the substrate to a second process condition comprising an oxygen source reactant to selectively form an aluminum oxide (AlOx) etch stop layer onto the metal surface while leaving exposed the dielectric surface; and
optionally repeating exposure to the first process condition and the second process condition to form a desired thickness of the AlOx etch stop layer.
2. The processing method of claim 1 , wherein the isopropoxide based aluminum precursor comprises dimethyl aluminum isopropoxide.
3. The processing method of claim 1 , wherein the dielectric surface comprises silicon.
4. The processing method of claim 1 , wherein the substrate is at a temperature of less than 400° C.
5. The processing method of claim 1 , wherein the reactant is non-oxidizing to the metal surface.
6. The processing method of claim 5 , wherein the reactant comprises an alcohol.
7. A processing method comprising:
positioning a substrate within a processing chamber, wherein the substrate comprises a copper or tungsten surface and a dielectric surface; and
exposing the substrate to a first process condition comprising an aluminum precursor gas comprising dimethyl aluminum isopropoxide;
exposing the substrate to a second process condition comprising an alcohol reactant to selectively form an aluminum oxide (AlOx) etch stop layer having a selectivity of at least about 5:1 onto the copper or tungsten surface while leaving exposed the dielectric surface; and
optionally repeating exposure to the first process condition and the second process condition to form a desired thickness of the aluminum oxide etch stop layer.
8. The processing method of claim 7 , wherein during the process a temperature of the substrate is 400° C. or less.
9. The processing method of claim 7 , wherein the process is an atomic layer deposition (ALD) process.
10. The processing method of claim 7 , further comprising forming a SiOC layer onto the AlOx etch stop layer.
11. The processing method of claim 7 , wherein the alcohol comprises ethanol.
12. The processing method of claim 7 , wherein the AlOx etch stop layer comprises less than 10% carbon on an atomic basis.
13. The processing method of claim 7 , wherein the dielectric surface comprises silicon.