IP Library › Granted Patent US 11,060,856
Granted Patent B2
US 11,060,856 · App. 16/963,050 · Granted Jul 13, 2021

Misalignment detection device and misalignment detection method

Inventor: Yasushi Sasa (Kyoto, JP)
Assignee: SCREEN HOLDINGS CO., LTD.
G01B11/27G01B11/272G01N21/95G01N21/9515G01N21/95607G06T7/001G06T7/337G06T7/68G06T7/74G01N2021/8887
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Quick Facts
Patent No.
US 11,060,856
App. No.
16/963,050
Granted
Jul 13, 2021
Kind
B2
Abstract

A device includes a storage 52 for storing a reference pattern corresponding to a part of a workpiece outer peripheral part, an imager 27 for imaging the outer peripheral part at least for one turn of a workpiece by such imaging at a fixed point as to include at least a part of the outer peripheral part in an imaging field of view, an image processor 55 for detecting a region corresponding to the reference pattern by performing a pattern matching process, and a misalignment detector 51 for detecting the misalignment based on information on a position of each of a plurality of the detected regions. The reference pattern corresponds in shape to a plurality of characteristic parts that present on the outer peripheral part, have shapes congruent to each other and have a mutually symmetrical positional relationship with respect to rotation about the center axis.

Claims (17)

1. A misalignment detection device that detects a misalignment of a center axis with respect to an axis of rotation when a workpiece having such an outer peripheral shape that a distance in a radial direction from the center axis to an outer peripheral part repeatedly increases and decreases in a circumferential direction rotates about the axis of rotation, the device comprising:

a storage that stores a reference pattern corresponding to a part of the outer peripheral part;

an imager that images the outer peripheral part at least for one turn of the workpiece by such imaging at a fixed point as to include at least a part of the outer peripheral part in an imaging field of view;

an image processor that detects a region corresponding to the reference pattern by performing a pattern matching process for an image captured by the imager; and

a misalignment detector that detects the misalignment based on information on a position of each of a plurality of the detected regions, wherein

the reference pattern corresponds in shape to a plurality of characteristic parts that present on the outer peripheral part, have shapes congruent to each other and have a mutually symmetrical positional relationship with respect to rotation about the center axis.

2. The misalignment detection device according to claim 1 , wherein the misalignment detector detects the misalignment based on a variation amount of a position in the radial direction between the plurality of detected regions.

3. The misalignment detection device according to claim 1 , wherein the imager includes such a line sensor that a longitudinal direction of the imaging field of view is aligned with the radial direction.

4. The misalignment detection device according to claim 3 , wherein the image processor performs the pattern matching process for a two-dimensional image obtained by arraying one-dimensional images obtained by the line sensor in chronological order of imaging.

5. The misalignment detection device according to claim 4 , wherein the misalignment detector obtains the misalignment based on an amplitude and a phase angle of a sine function approximating position coordinates of the regions in the two-dimensional image.

6. A misalignment detection method that detects a misalignment of a center axis with respect to an axis of rotation when a workpiece having such an outer peripheral shape that a distance in a radial direction from the center axis to an outer peripheral part repeatedly increases and decreases in a circumferential direction rotates about the axis of rotation, the method comprising:

imaging the outer peripheral part at least for one turn of the workpiece by such imaging at a fixed point as to include at least a part of the outer peripheral part in an imaging field of view;

detecting a region corresponding to a reference pattern determined in advance to correspond to a part of the outer peripheral part by performing a pattern matching process for a captured image; and

detecting the misalignment based on information on a position of each of a plurality of the detected regions, wherein

the reference pattern corresponds in shape to a plurality of characteristic parts that present on the outer peripheral part, have shapes congruent to each other and have a mutually symmetrical positional relationship with respect to rotation about the center axis.

7. The misalignment detection method according to claim 6 , wherein the pattern matching process is performed for a two-dimensional image obtained by arraying one-dimensional images obtained by such a line sensor that a longitudinal direction of the imaging field of view is aligned with the radial direction in chronological order of imaging.

8. The misalignment detection method according to claim 6 , comprising removing insignificant positions, out of the positions of the plurality of regions detected by the pattern matching process.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2020
From: SASA, YASUSHI
To: SCREEN HOLDINGS CO., LTD.
Reel/Frame 053260/0805 →
Priority Claims (1)
JP JP2018-033372 · Feb 27, 2018 · national
Continuity (1)
Related Publication 20200348128A1 · Nov 5, 2020
Cited By (1)
US 12,427,528