Spin orbit torque memory devices and methods of fabrication
A perpendicular spin orbit torque memory device includes a first electrode having tungsten and at least one of nitrogen or oxygen and a material layer stack on a portion of the first electrode. The material layer stack includes a free magnet, a fixed magnet above the first magnet, a tunnel barrier between the free magnet and the fixed magnet and a second electrode coupled with the fixed magnet.
1. A perpendicular spin orbit memory device, comprising:
a first electrode, comprising a material selected from a group consisting of tungsten, nitrogen and tantalum, wherein the first electrode comprises greater than 95 atomic percent of beta phase tungsten and wherein the first electrode comprises at least four times more tantalum than nitrogen; and
a material layer stack on a portion of the first electrode, the material layer stack comprising:
a first magnet having a free magnetization;
a second magnet above the first magnet;
a layer between the first magnet and the second magnet; and
a second electrode coupled with the second magnet.
2. The perpendicular spin orbit memory device of claim 1 , wherein the first electrode has a thickness between 3 nm and 12 nm.
3. The perpendicular spin orbit memory device of claim 1 , wherein the first electrode further comprises oxygen.
4. The perpendicular spin orbit memory device of claim 1 , wherein the first electrode has a thickness between 3 nm and 15 nm.
5. The perpendicular spin orbit memory device of claim 1 , wherein the first electrode has a first portion under the material layer stack having a first thickness and a second portion laterally adjacent to the first portion having a second thickness, and wherein the first thickness is greater than the second thickness.
6. The perpendicular spin orbit memory device of claim 5 , wherein the first thickness is between 1 nm and 3 nm greater than the second thickness.
7. The perpendicular spin orbit memory device of claim 5 , wherein the first thickness is at least 5 nm.
8. The perpendicular spin orbit memory device of claim 1 , wherein the first magnet and the second magnet comprises at least one of cobalt, iron or boron and the layer between the first magnet and the second magnet comprises oxygen and magnesium.