Top via interconnects with wrap around liner
A method includes patterning an interconnect trench in a dielectric layer. The interconnect trench has sidewalk and a bottom surface. A liner layer is deposited on the sidewalls and the bottom surface of the interconnect trench. The interconnect trench is filled with a first conductive metal material. The conducting metal material is recessed to below a top surface of the dielectric layer. A cap layer is deposited on a top surface of the first conductive metal material. The cap layer and the liner layer are of the same material. The method further includes forming a via on a portion of the interconnect trench.
1. A method for fabricating a semiconductor structure, comprising:
patterning an interconnect trench in a dielectric layer, wherein the interconnect trench has sidewalls and a bottom surface;
depositing a liner layer on the sidewalls and the bottom surface of the interconnect trench;
filling the interconnect trench with a first conductive metal material;
recessing the first conductive metal material to below a top surface of the dielectric layer;
depositing a cap layer on a top surface of the first conductive metal material;
forming a hardmask on a top surface of the dielectric layer and the cap layer;
patterning the hardmask to form a via opening in the hardmask exposing the top surface of the cap layer;
etching the cap layer in the via opening to expose the top surface of the first conductive metal material;
filling the via opening with a second conductive metal material;
removing the hardmask leaving a via structure in alignment with the interconnect trench; and
forming a refractory metal layer on sidewalls of the via structure.
2. The method according to claim 1 , wherein the semiconductor structure is formed as part of a back-end-of-line structure.
3. The method according to claim 1 , wherein the dielectric layer comprises an ultra low-k dielectric material.
4. The method according to claim 1 , wherein the liner layer and the cap layer comprise one or more of ruthenium, cobalt, molybdenum, and nickel, and the first conductive metal material comprises one or more of tungsten, titanium, tantalum, ruthenium, zirconium, cobalt, copper, aluminum, lead, platinum, tin, silver, and gold, wherein the liner layer and the cap layer are different than the first conductive metal material.
5. The method according to claim 1 , wherein the liner layer and the cap layer are ruthenium and the first conductive metal material is copper.
6. The method according to claim 1 , wherein forming a refractory metal layer on sidewalls of the via structure comprises:
depositing the refractory metal layer on the top surface of the dielectric layer and the cap layer and over the via structure; and
removing the refractory metal layer from the top surface of the dielectric layer, the cap layer and the via structure leaving the refractory metal layer on the sidewalls of the via structure.
7. The method according to claim 1 , wherein the first conductive metal material is different than the second conductive metal material.
8. The method according to claim 1 , wherein the liner layer, the cap layer and the second conductive metal material are ruthenium and the first conductive metal material is copper.
9. The method according to claim 6 , wherein the refractory metal layer is removed from the top surface of the dielectric layer, the cap layer and the via structure with an argon plasma etch.
10. The method according to claim 1 , wherein the refractory metal layer is TaN.
11. The method according to claim 1 , wherein a thickness of the liner layer on the sidewalls of the interconnect trench is from about 0.5 to about 3 nanometers (nm) and the thickness of the liner layer on the bottom surface of the interconnect trench is from about 0.5 to about 3 nm.
12. A semiconductor structure comprising:
a dielectric layer having at least one interconnect trench, wherein the interconnect trench has sidewalls and a bottom surface;
a liner layer disposed on the sidewalls and the bottom surface of the interconnect trench;
a first conductive metal material disposed on the liner layer, wherein the first conductive metal material is configured to be below a top surface of the dielectric layer;
a cap layer disposed on a portion of a top surface of the first conductive metal material; and
a via structure disposed on and in alignment with the at least one interconnect trench, wherein the via structure comprises a second conductive metal material disposed on the first conductive metal material;
wherein sidewalls of the via structure have a refractory metal layer disposed thereon.
13. The semiconductor structure according to claim 12 , wherein the semiconductor structure is formed as part of a back-end-of-line structure.
14. The semiconductor structure according to claim 12 , wherein the first conductive metal material is different than the second conductive metal material.
15. An integrated circuit comprising:
one or more semiconductor structures, wherein at least one of the one or more semiconductor structures comprises:
a dielectric layer having at least one interconnect trench, wherein the interconnect trench has sidewalls and a bottom surface;
a liner layer disposed on the sidewalls and the bottom surface of the interconnect trench;
a first conductive metal material disposed on the liner layer, wherein the first conductive metal material is configured to be below a top surface of the dielectric layer;
a cap layer disposed on a portion of a top surface of the first conductive metal material; and
a via structure disposed on and in alignment with the at least one interconnect trench, wherein the via structure comprises a second conductive metal material disposed on the first conductive metal material;
wherein sidewalls of the via structure have a refractory metal layer disposed thereon.
16. The integrated circuit according to claim 15 , wherein the first conductive metal material is different than the second conductive metal material.
17. The integrated circuit according to claim 15 , wherein the refractory metal layer is TaN.
18. The integrated circuit according to claim 15 , wherein the liner layer and the cap layer comprise one or more of ruthenium, cobalt, molybdenum, and nickel, and the first conductive metal material comprises one or more of tungsten, titanium, tantalum, ruthenium, zirconium, cobalt, copper, aluminum, lead, platinum, tin, silver, and gold, wherein the liner layer and the cap layer are different than the first conductive metal material.
19. The integrated circuit according to claim 15 , wherein the liner layer and the cap layer are ruthenium and the first conductive metal material is copper.
20. The semiconductor structure according to claim 12 , wherein the refractory metal layer is TaN.