Semiconductor devices
A semiconductor device includes: a plurality of lower electrodes arranged on a substrate in a first direction, which is parallel to a main surface of the substrate, and a second direction parallel to the main surface of the substrate and perpendicular to the first direction; and a support structure pattern configured to connect the plurality of lower electrodes to each other to support the plurality of lower electrodes, on the substrate and including a plurality of open portions. The plurality of open portions have shapes extending longer in the second direction than in the first direction, and when viewed from inner sides of the plurality of open portions, the plurality of open portions are convex in the first direction and are concave in the second direction.
1. A semiconductor device comprising:
a substrate;
a plurality of lower electrodes disposed on the substrate, and including a plurality of first lower electrodes and a plurality of second lower electrodes that are respectively arranged in a first direction and alternately arranged in a second direction perpendicular to the first direction, each of the plurality of second lower electrodes being offset from each of the plurality of first lower electrodes with respect to the second direction;
a support structure pattern contacting the plurality of lower electrodes;
a plurality of openings disposed in the support structure pattern, arranged in the first direction and in the second direction, one of the plurality of openings exposes only two of the plurality of first lower electrodes and exposes only two of the plurality of second lower electrodes among the plurality of lower electrodes;
a dielectric layer disposed on the plurality of lower electrodes and the support structure pattern; and
an upper electrode disposed on the dielectric layer, wherein
a first width of the one of the plurality of openings in the first direction is less than a second width of the one of the plurality of openings in the second direction,
an area of a top surface of at least one of the two of the plurality of first lower electrodes is smaller than an area of a top surface of at least one of the two of the plurality of second lower electrodes,
and
the plurality of openings are offset from one another with respect to the first direction and with respect to the second direction.
2. The semiconductor device of claim 1 , wherein the plurality of first lower electrodes are arranged side by side in the first direction with the plurality of openings, and the plurality of second lower electrodes are arranged side by side in the second direction with the plurality of openings, and the plurality of openings expose all of the first lower electrodes and the second lower electrodes.
3. The semiconductor device of claim 1 , wherein the support structure pattern includes a first support structure pattern having a plurality of first openings and a second support structure pattern having a plurality of second openings, the first support structure pattern being at a lower level than the second support structure pattern with respect to a main surface of the substrate.
4. The semiconductor device of claim 3 , wherein the plurality of first openings and the plurality of second openings overlap one another in a direction perpendicular to the main surface of the substrate.
5. The semiconductor device of claim 3 , wherein a cross- section area of one of the plurality of first openings is smaller than a cross-section area of one of the plurality of second openings.
6. The semiconductor device of claim 1 , wherein the plurality of lower electrodes have cylinder-type structures.
7. The semiconductor device of claim 1 , wherein the plurality of lower electrodes have pillar-type structures.
8. The semiconductor device of claim 1 , wherein minimum distances from central portions of cross-sections of plurality of first lower electrodes to the plurality of openings are less than minimum distances from central portions of cross-sections of the plurality of second lower electrodes to the plurality of openings.
9. The semiconductor device of claim 8 , wherein widths of the cross-sections of the plurality of first lower electrodes in the first direction are less than widths of the cross-sections of the plurality of first lower electrodes in the second direction.
10. The semiconductor device of claim 1 , wherein each of the plurality of first lower electrodes has a sloped sidewall.
11. The semiconductor device of claim 1 , wherein the plurality of openings are convex in the first direction when viewed from inner sides of the plurality of openings.
12. A semiconductor device comprising:
a substrate;
a plurality of lower electrodes disposed on the substrate, and including a plurality of first lower electrodes and a plurality of second lower electrodes that are respectively arranged in a first direction and alternately arranged in a second direction perpendicular to the first direction, each of the plurality of second lower electrodes being offset from each of the plurality of first lower electrodes with respect to the second direction, each of the plurality of first lower electrodes having a first recess portion, each of the plurality of second lower electrodes having a second recess portion;
a support structure pattern contacting the plurality of lower electrodes and having a plurality of open portions, the support structure pattern including a first support structure pattern having a plurality of first open portions and a second support structure pattern having a plurality of second open portions, the first support structure pattern being at a lower level than the second support structure pattern with respect to a main surface of the substrate, one of the plurality of second open portions exposing only two of the plurality of first lower electrodes and exposing only two of the plurality of second lower electrodes among the plurality of lower electrodes;
a dielectric layer disposed on the plurality of lower electrodes and the support structure pattern; and
an upper electrode disposed on the dielectric layer, wherein
a cross-section area of one of the plurality of first open portions is smaller than a cross-section area of one of the plurality of second open portions,
a first width of the one of the plurality of second open portions in the first direction is less than a second width of the one of the plurality of second open portions in the second direction, and
an area of a top surface except the first recess portion of at least one of the two of the plurality of first lower electrodes is smaller than an area of a top surface except the second recess portion of at least one of the two of the plurality of second lower electrodes.
13. The semiconductor device of claim 12 , wherein the plurality of first open portions and the plurality of second open portions overlap one another in a direction perpendicular to a main surface of the substrate.
14. The semiconductor device of claim 12 , wherein the plurality of lower electrodes have cylinder-type structures.
15. The semiconductor device of claim 12 , wherein minimum distances from central portions of cross-sections of plurality of first lower electrodes to the plurality of second open portions are less than minimum distances from central portions of cross-sections of the plurality of second lower electrodes to the plurality of second open portions.
16. The semiconductor device of claim 12 , wherein the plurality of second open portions are arranged in the first direction and in the second direction.
17. The semiconductor device of claim 12 , wherein the plurality of second open portions are offset from one another with respect to the first direction and with respect to the second direction.
18. The semiconductor device of claim 12 , wherein each of the plurality of first lower electrodes has a sloped sidewall.
19. The semiconductor device of claim 12 , wherein the plurality of second open portions are convex in the first direction when viewed from inner sides of the plurality of second open portions.
20. A semiconductor device comprising:
a substrate;
a plurality of lower electrodes disposed on the substrate, and including a plurality of first lower electrodes and a plurality of second lower electrodes that are respectively arranged in a first direction and alternately arranged in a second direction perpendicular to the first direction, each of the plurality of second lower electrodes being offset from each of the plurality of first lower electrodes with respect to the second direction, each of the plurality of first lower electrodes and the plurality of second lower electrodes including a rounded sidewall and a bottom surface, and a recess portion defined by the rounded sidewall and the bottom surface;
a support structure pattern contacting the plurality of lower electrodes and having a plurality of open portions, the support structure pattern including a first support structure pattern having a plurality of first open portions and a second support structure pattern having a plurality of second open portions, the first support structure pattern being at a lower level than the second support structure pattern with respect to a main surface of the substrate, the plurality of second open portions being arranged in the first direction and in the second direction;
a dielectric layer disposed on the plurality of lower electrodes and the support structure pattern; and
an upper electrode disposed on the dielectric layer, wherein
one of the plurality of second open portions exposes only two of the plurality of first lower electrodes and exposes only two of the plurality of second lower electrodes among the plurality of lower electrodes,
a first width of the one of the plurality of second open portions in the first direction is less than a second width of the one of the plurality of second open portions in the second direction,
an area of a top surface of at least one of the two of the plurality of first lower electrodes is smaller than an area of a top surface of at least one of the two of the plurality of second lower electrodes, and
the plurality of first lower electrodes are arranged side by side in the first direction with the plurality of second open portions and the plurality of second lower electrodes are arranged side by side in the second direction with the plurality of second open portions, and the plurality of second open portions are offset from one another with respect to the first direction and with respect to the second direction.