Inductor, filter, and multiplexer
An inductor includes: a substrate; a first wiring line located on the substrate; a second wiring line located above the first wiring line and spaced from the first wiring line through an air gap, at least a part of the second wiring line overlapping with at least a part of the first wiring line in plan view; a first supporting post connecting ends of the first and second wiring lines such that a direct current conducts between the first and second wiring lines through the first supporting post; and a second supporting post provided such that the second supporting post overlaps with the second wiring line in plan view, and overlaps with the first wiring line in plan view or is surrounded by the first wiring line in plan view, the second supporting post being insulated from the first wiring line, the second supporting post supporting the second wiring line.
1. An inductor comprising:
a substrate;
a first wiring line located on the substrate;
a second wiring line located above the first wiring line and spaced from the first wiring line through an air gap, at least a part of the second wiring line overlapping with at least a part of the first wiring line in plan view;
a first supporting post connecting an end of the first wiring line and an end of the second wiring line such that a direct current conducts between the first wiring line and the second wiring line through the first supporting post; and
a second supporting post which overlaps with the second wiring line in plan view, and is surrounded by the first wiring line in plan view, the second supporting post being insulated from the first wiring line, the second supporting post supporting the second wiring line,
wherein
the second supporting post does not overlap with the first wiring line in plan view, and is located in an opening, and
the first wiring line has the opening and the opening is a closed area completely surrounded by the first wiring line.
2. The inductor according to claim 1 , wherein
the first wiring line and the second wiring line have a coil shape surrounding a center region.
3. The inductor according to claim 1 , wherein
a dimension of the opening is equal to or less than three-quarters of a width of the first wiring line.
4. An inductor comprising:
a substrate;
a first wiring line located on the substrate;
a second wiring line located above the first wiring line and spaced from the first wiring line through an air gap, at least a part of the second wiring line overlapping with at least a part of the first wiring line in plan view;
a first supporting post connecting an end of the first wiring line and an end of the second wiring line such that a direct current conducts between the first wiring line and the second wiring line through the first supporting post; and
a second supporting post which overlaps with the second wiring line in plan view, and is surrounded by the first wiring line in plan view, the second supporting post being insulated from the first wiring line, the second supporting post supporting the second wiring line,
wherein
the second supporting post does not overlap with the first wiring line in plan view, and is located in a cutout, and
the first wiring line has the cutout and the cutout is a recessed area on an outer circumference of the first wiring line.
5. The inductor according to claim 1 , wherein
the second supporting post includes a first metal layer located on the substrate and a second metal layer located on the first metal layer, the first metal layer being made of a material substantially identical to a material of a metal layer forming the first wiring line, and having a thickness substantially identical to a thickness of the metal layer forming the first wiring line, the second metal layer being made of a material substantially identical to a material of a metal layer forming the first supporting post, and having a thickness substantially identical to a thickness of the metal layer forming the first supporting post.
6. An inductor comprising:
a substrate;
a first wiring line located on the substrate;
a second wiring line located above the first wiring line and spaced from the first wiring line through an air gap, at least a part of the second wiring line overlapping with at least a part of the first wiring line in plan view;
a first supporting post connecting an end of the first wiring line and an end of the second wiring line such that a direct current conducts between the first wiring line and the second wiring line through the first supporting post; and
a second supporting post which overlaps with the second wiring line and the first wiring line in plan view, the second supporting post being insulated from the first wiring line, the second supporting post supporting the second wiring line, wherein
the second supporting post mechanically connects between the wiring line and the second wiring line and does not electrically connect the first wiring line and the second wiring line, and at least a part of the second supporting post is made of an insulating material.
7. The inductor according to claim 6 , further comprising:
an insulating film located between the first wiring line and the second supporting post and/or between the second wiring line and the second supporting post, wherein
at least a part of the second supporting post is made of metal.
8. The inductor according to claim 1 , wherein
at least a part of the second supporting post is made of metal.
9. A filter comprising:
the inductor according to claim 1 .
10. A multiplexer comprising:
the according to claim 1 .
11. The inductor according to claim 4 , wherein
the first wiring line and the second wiring line have a coil shape surrounding a center region.
12. The inductor according to claim 6 , wherein
the first wiring line and the second wiring line have a coil shape surrounding a center region.
13. The inductor according to claim 4 , wherein
the second supporting post includes a first metal layer located on the substrate and a second metal layer located on the first metal layer, the first metal layer being made of a material substantially identical to a material of a metal layer forming the first wiring line, and having a thickness substantially identical to a thickness of the metal layer forming the first wiring line, the second metal layer being made of a material substantially identical to a material of a metal layer forming the first supporting post, and having a thickness substantially identical to a thickness of the metal layer forming the first supporting post.
14. A filter comprising:
the inductor according to claim 4 .
15. A multiplexer comprising:
the inductor according to claim 4 .
16. A filter comprising:
the inductor according to claim 6 .
17. A multiplexer comprising:
the inductor according to claim 6 .