Substrate storage container
Provided is a substrate storage container including a valve(s) capable of controlling flow of gas without using a metallic member. The valve(s) are attached to a substrate storage container and include: a cylindrical body having an open edge and an interior space; a stopcock portion partitioning the interior space into a first space and a second space and extending to the open edge; and an elastic body covering the open edge and the stopcock portion. The first space has a first communication hole communicating with an outside of the container body. The second space has a second communication hole communicating with an inside of the container body. The elastic body controls flow of gas relative to the container body by closely contacting the stopcock portion or separating from the stopcock portion.
1. A substrate storage container, comprising:
a container body for storing a substrate;
a lid for closing an opening of the container body; and
a valve for controlling flow of gas relative to the container body,
wherein the valve has:
a cylindrical body having an open edge and an interior space;
a stopcock portion partitioning the interior space into a first space and a second space and extending to the open edge; and
an elastic body covering the open edge and the stopcock portion,
wherein the first space has a first communication hole communicating with an outside of the container body, and the second space has a second communication hole communicating with an inside of the container body, and
wherein the elastic body controls the flow of the gas relative to the container body by closely contacting the stopcock portion or separating from the stopcock portion.
2. The substrate storage container according to claim 1 , wherein
the elastic body has a plate-like shape and seals between the open edge above the first space and the stopcock portion and between the stopcock portion and the open edge above the second space so that the gas flows only through the first space and the second space.
3. The substrate storage container according to claim 1 , wherein
the elastic body enables the flow of the gas relative to the container body by bulging to form a clearance against the stopcock portion when positive pressure is applied to the first space or the second space, and blocks the flow of the gas relative to the container body by closely contacting the stopcock portion when the positive pressure is not applied to the first space and the second space.
4. The substrate storage container according to claim 1 , wherein
the elastic body is detachably attached to the cylindrical body.
5. The substrate storage container according to claim 1 , wherein
the valve is attached in a midway of a gas flow passage provided to the container body.
6. The substrate storage container according to claim 1 , wherein
the first communication hole communicates with a fixation cylinder fitted in a through hole formed in the container body, and
wherein the second communication hole communicates with a holding cylinder combined with the fixation cylinder.
7. The substrate storage container according to claim 1 , wherein
the first communication hole communicates with a fixation cylinder fitted in a through hole formed in the container body, and
wherein the second communication hole communicates with an inner lid cylinder connected to a holding cylinder combined with the fixation cylinder.
8. The substrate storage container according to claim 6 , wherein
the valve has a filter for filtering the gas.
9. The substrate storage container according to claim 7 , wherein
the valve has a filter for filtering the gas.