Cooler and semiconductor module

1. A cooler comprising: a flow-channel part at least including a top plate and a bottom plate; and a plurality of continuous groove-like flow channels defined between the top plate and the bottom plate to flow fluid, the cooler being configured to cool a semiconductor element, wherein

the plurality of flow channels is formed evenly spaced in parallel when viewed from a direction perpendicular to the top plate,

the plurality of flow channels are all equal in distance from the top plate when viewed from a direction parallel to the top plate and intersecting the flow channels, the flow channels each has a corrugated shape so that faces of the flow channels closer to the top plate and faces of the flow channels closer to the bottom plate bend in a synchronized manner toward the top plate and the bottom plate.

2. A cooler comprising: a flow-channel part at least including a top plate and a bottom plate; and a plurality of continuous groove-like flow channels defined between the top plate and the bottom plate to flow fluid, the cooler being configured to cool a semiconductor element,

wherein when viewed from a direction parallel to the top plate and intersecting the flow channels, each of the flow channel has a corrugated shape so that a face of the flow channel closer to the top plate and a face of the flow channel closer to the bottom plate bend in a synchronized manner toward the top plate and the bottom plate,

the flow-channel part includes at least one plate-like fin disposed between the top plate and the bottom plate, the plurality of flow channels is formed in parallel in a vertical direction and is partitioned by the plate-like fin and is defined between the top plate and the bottom plate, and

when the flow-channels are viewed from the direction parallel to the top plate and intersecting the flow channels, the plurality of flow channels each has a corrugated shape so that faces of the flow channels closer to the top plate and faces of the flow channels closer to the bottom plate bend in a synchronized manner with an upper face and a lower face of the plate-like fin.

3. A cooler comprising:

a flow-channel part at least including a top plate and a bottom plate; and a plurality of continuous groove-like flow channels defined between the top plate and the bottom plate to flow fluid, the cooler being configured to cool a semiconductor element,

wherein when the flow-channels are viewed from a direction parallel to the top plate and intersecting the flow channels, each of the flow channels has a corrugated shape so that a face of the flow channel closer to the top plate and a face of the flow channel closer to the bottom plate bend in a synchronized manner toward the top plate and the bottom plate, and

when the flow-channels are viewed from a direction perpendicular to the top plate, each of the flow channels has a corrugated shape so that two side faces of the flow channel bend in a synchronized manner.

4. The cooler according to claim 3 , wherein the corrugated shape of the flow channel viewed from the direction perpendicular to the top plate and the corrugated shape of the flow channel viewed from the direction parallel to the top plate and intersecting the flow channel have a phase difference ϕ satisfying a relationship of 0°+90° n≤ϕ≤30°+90° n or 60°+90° n≤ϕ≤90°+90° n (n=0,1,2,3).

5. The cooler according to claim 3 , wherein when x 1 denotes amplitude of the flow channel viewed from the direction perpendicular to the top plate and z 1 denotes amplitude of the flow channel viewed from the direction parallel to the top plate and intersecting the flow channel, x 1 and z 1 have a relationship of z 1 ≤x 1 ≤3z 1 .

6. The cooler according to claim 3 , wherein when x 2 denotes an interval between the adjacent flow channels and x 3 denotes a width of each flow channel viewed from the direction perpendicular to the top plate, x 2 and x 3 have a relationship of 2x 3 ≤x 2 .

7. A semiconductor module comprising:

a semiconductor element;

a multilayer board having the semiconductor element mounted thereon, the multilayer board including an insulating substrate and conducting plates sandwiching the insulating substrate from an upper face and a lower face of the insulating substrate; and

a cooler bonding with a face of the multilayer board where the semiconductor element is not mounted, the cooler being configured to flow fluid to cool the semiconductor element, the cooler being the cooler according to claim 1 .

8. The cooler according to claim 2 , wherein the plurality of the flow channels is formed evenly spaced in parallel when viewed from a direction perpendicular to the top plate, and the flow channels are all equal in distance from the top plate when viewed from the direction parallel to the top plate and intersecting the flow channels.

9. The cooler according to claim 3 , wherein an interval y 1 between a crest and a trough of the flow channel viewed from the direction perpendicular to the top plate is equal to an interval y 2 between a crest and a trough of the flow channel viewed from the direction parallel to the top plate and intersecting the flow channel.

10. The cooler according to claim 3 , wherein the flow-channel part further includes at least one fin having grooves each forming the flow channel and arranged side by side in the at least one fin, each groove having a plurality of deep parts and shallow parts arranged alternately in a thickness direction of the at least one fin.

11. The cooler according to claim 10 , wherein the flow-channel part further includes another fin having grooves each forming the flow channel and arranged side by side in the another fin, each groove of the another fin having a plurality of deep parts and shallow parts arranged alternately in the thickness direction of the another fin, the deep parts and the shallow parts of the another fin being arranged to face the shallow parts and the deep parts of the at least one fin.