Edge barrier film for electronic devices
In some embodiments, a first product is provided. The first product may include a substrate, a device having a device footprint disposed over the substrate, and a barrier film disposed over the substrate and substantially along a side of the device footprint. The barrier film may comprise a mixture of a polymeric material and non-polymeric material. The barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
1. A method comprising:
providing a substrate having a device disposed over the substrate, the device having a device footprint;
fabricating a barrier layer over the device; and
fabricating a barrier film substantially along a side of the device footprint,
wherein a footprint of the barrier film is not more than 3.0 mm wider than the device footprint on one or more sides of the device.
2. The method of claim 1 , wherein the barrier layer comprises a mixture of an oxide and polymeric silicon.
3. The method of claim 1 , wherein the barrier layer comprises at least 40% inorganic silicon.
4. The method of claim 1 , wherein the barrier layer is a multilayer barrier film comprising a polymeric layer and a non-polymeric layer.
5. The method of claim 1 , wherein the barrier layer comprises a mixture of polymeric material and non-polymeric material, and a weight ratio of polymeric to non-polymeric material in the barrier layer is in a range of 25:75 to 10:90.
6. The method of claim 4 , wherein the barrier layer has a wetting contact angle in a range of 36° to 60°.
7. The method of claim 1 , wherein the barrier layer is a single-layer barrier film.
8. The method of claim 1 , wherein the barrier film is a single-layer barrier film.
9. The method of claim 1 , wherein the barrier layer is fabricated over the device prior to fabricating the barrier film along the side of the device footprint.
10. The method of claim 9 , wherein the step of fabricating the barrier film comprises fabricating the barrier film over at least a portion of the barrier layer.
11. The method of claim 1 , wherein the step of fabricating the barrier layer comprises:
depositing an epoxy layer directly over the device; and
depositing a glass encapsulation layer directly over the epoxy layer such that the glass encapsulation layer is coupled to the epoxy layer.
12. The method of claim 1 , wherein the step of fabricating the barrier layer comprises:
depositing a hybrid polymeric/non-polymeric material barrier layer directly over the device;
depositing an epoxy layer directly over the hybrid layer; and
depositing a glass encapsulation layer directly on the epoxy layer such that the glass encapsulation layer is coupled to the epoxy layer.
13. The method of claim 1 , wherein the barrier layer comprises a plurality of inorganic layers and a plurality of polymer layers.
14. The method of claim 13 , further comprising depositing alternating layers of the inorganic layers and the polymer layers.
15. The method of claim 13 , wherein the plurality of inorganic layers and the plurality of polymer layers are deposited through a single mask.