Active matrix substrate, liquid crystal display device with touch sensor using active matrix substrate, and method for manufacturing active matrix substrate

1. An active matrix substrate comprising:

a substrate;

a plurality of TFTs supported on the substrate;

an interlayer insulating layer that covers the plurality of TFTs;

a common electrode disposed on the interlayer insulating layer and divided into a plurality of segments each of which functions as a touch sensor electrode;

a first dielectric layer that covers the common electrode;

a plurality of pixel electrodes disposed on the first dielectric layer, each of which is electrically connected to any one of the plurality of TFTs;

a second dielectric layer that covers the plurality of pixel electrodes;

a plurality of touch wirings disposed on the second dielectric layer, each of which is electrically connected to any one of the plurality of touch sensor electrodes, wherein

the common electrode k between the plurality of touch wirings and the substrate, the first dielectric layer is between the plurality of touch wirings and the common electrode, the second dielectric layer is between the first dielectric layer and the plurality of touch wirings, and the plurality of pixel electrodes are between the first dielectric layer and the second dielectric layer,

each of the pixel electrodes at least partially overlaps the common electrode via the first dielectric layer, to define an auxiliary capacitor which includes each of the pixel electrodes, the common electrode, and the first dielectric layer,

the plurality of touch sensor electrodes include a first electrode, the plurality of touch wirings include a first wiring electrically connected to the first electrode and a second wiring electrically connected to another electrode other than the first electrode in the plurality of touch sensor electrodes, the second wiring extends to the other electrode across the first electrode when viewed from a normal direction of the substrate, and

a portion of the second wiring overlaps the first electrode via the first dielectric layer and the second dielectric layer, so that a touch wiring capacitance including the second wiring, the first electrode, the first dielectric layer, and the second dielectric layer is formed.

2. The active matrix substrate according to claim 1 , wherein

the first dielectric layer and the second dielectric layer are formed of the same material.

3. The active matrix substrate according to claim 1 , wherein

a thickness of the second dielectric layer is less than a thickness of the first dielectric layer.

4. The active matrix substrate according to claim 1 , wherein

a thickness of the second dielectric layer is 5 nm or more and 100 nm or less.

5. The active matrix substrate according to claim 1 , wherein

each of the plurality of touch wirings is electrically connected to any one of the touch sensor electrodes in a sensor contact hole formed in the first dielectric layer and the second dielectric layer.

6. The active matrix substrate according to claim 1 , further comprising:

a plurality of connection electrodes formed by using the same conductive film as the plurality of touch wirings and electrically separated from the plurality of touch wirings, wherein

each of the pixel electrodes is electrically connected to a drain electrode of any one of the TFTs via any one of the plurality of connection electrodes.

7. The active matrix substrate according to claim 6 , further comprising:

a pixel contact hole that includes

a first opening portion formed in the interlayer insulating layer and the first dielectric layer and exposing a first portion of the drain electrode of any one of the TFTs,

a second opening portion or a notched portion formed in each of the pixel electrodes, exposing the first portion, and at least partially overlapping the first opening portion when viewed from the normal direction of the substrate, and

a third opening portion formed in the second dielectric layer and exposing a portion of each of the pixel electrodes and the first portion, wherein

each of the connection electrodes is connected to the first portion and the portion of each of the pixel electrodes in the pixel contact hole.

8. The active matrix substrate according to claim 7 , wherein

a side surface of the first opening portion is at least partially aligned with a side surface of the second opening portion or the notched portion of each pixel electrode.

9. The active matrix substrate according to claim 7 , wherein

the side surface of the first opening portion is at least partially aligned with a side surface of the third opening portion of the second dielectric layer.

10. The active matrix substrate according to claim 1 , wherein

each of end portions of the plurality of touch wirings is electrically connected to a connection wiring formed of the same conductive film as source electrodes of the plurality of TFTs.

11. The active matrix substrate according to claim 10 , wherein

each of the end portions of the plurality of touch wirings is electrically connected to the connection wiring via a transparent electrode formed of the same transparent conductive film as the common electrode.

12. The active matrix substrate according to claim 1 , wherein

the plurality of TFTs include an oxide semiconductor layer as an active layer.

13. The active matrix substrate according to claim 12 , wherein

the oxide semiconductor layer includes an In—Ga—Zn—O-based semiconductor.

14. A liquid crystal display device with a touch sensor, the device comprising:

the active matrix substrate according to claim 1 ;

a counter substrate disposed so as to face the active matrix substrate; and

a liquid crystal layer provided between the active matrix substrate and the counter substrate, wherein

the active matrix substrate includes an alignment film disposed on the second dielectric layer, and the alignment film is in contact with the liquid crystal layer.

15. The active matrix substrate according to claim 1 , wherein no portion of the second dielectric layer is in the auxiliary capacitor.