IP Library Granted Patent US 11,081,453
Granted Patent B2
US 11,081,453 · App. 16/452,395 · Granted Aug 3, 2021

Semiconductor package structure with antenna

Inventors: Nai-Wei Liu (Hsin-Chu, TW); Yen-Yao Chi (Hsin-Chu, TW); Yeh-Chun Kao (Hsin-Chu, TW); Shih-Huang Yeh (Hsin-Chu, TW); Tzu-Hung Lin (Hsin-Chu, TW); Wen-Sung Hsu (Hsin-Chu, TW)
Assignee: MediaTek Inc.
H01L23/66H01L23/3128H01L23/3135H01L23/481H01L23/49822H01Q1/2283H01Q9/0407H01Q9/16H01L2223/6677
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Quick Facts
Patent No.
US 11,081,453
App. No.
16/452,395
Granted
Aug 3, 2021
Kind
B2
Abstract

A semiconductor package structure is provided. The semiconductor package structure includes a first redistribution layer (RDL) structure formed on a non-active surface of a semiconductor die. A second RDL structure is formed on and electrically coupled to an active surface of the semiconductor die. A ground layer is formed in the first RDL structure. A first molding compound layer is formed on the first RDL structure. A first antenna includes a first antenna element formed in the second RDL structure and a second antenna element formed on the first molding compound layer. Each of the first antenna element and the second antenna element has a first portion overlapping the semiconductor die as viewed from a top-view perspective.

Claims (41)

1. A semiconductor package structure, comprising:

a semiconductor die;

a first redistribution layer (RDL) structure on a non-active surface of the semiconductor die;

a second RDL structure on and electrically coupled to an active surface of the semiconductor die;

a ground layer in the first RDL structure;

a first molding compound layer on the first RDL structure; and

a first antenna, comprising:

a first antenna element in the second RDL structure; and

a second antenna element on the first molding compound layer,

wherein each of the first antenna element and the second antenna element has a first portion and a second portion adjoining the first portion, wherein each first portion overlaps the semiconductor die as viewed from a top-view perspective, wherein each of the first portions has a first edge and the first edges are aligned as viewed from the top-view perspective, and wherein each of the second portions has a second edge and the second edges are aligned as viewed from the top-view perspective.

2. The semiconductor package structure as claimed in claim 1 , wherein the ground layer has a through-opening overlapping the second portions as viewed from a top-view perspective.

3. The semiconductor package structure as claimed in claim 1 , further comprising:

a second molding compound layer surrounding the semiconductor die;

a through via structure in the second molding compound layer and electrically coupled between the ground layer and the second RDL structure; and

a second antenna in the second molding compound layer and electrically coupled to the ground layer by the second RDL structure and the through via structure.

4. The semiconductor package structure as claimed in claim 3 , wherein the first antenna is a patch antenna and the second antenna is a dipole antenna.

5. The semiconductor package structure as claimed in claim 3 , further comprising a plurality of dummy metal through via structures in the second molding compound layer and surrounding the semiconductor die.

6. The semiconductor package structure as claimed in claim 5 , wherein at least one of the plurality of dummy metal through via structures overlaps the second portions as viewed from a top-view perspective.

7. The semiconductor package structure as claimed in claim 3 , further comprising a metal dam in the second molding compound layer and surrounding the semiconductor die.

8. The semiconductor package structure as claimed in claim 7 , wherein the metal dam overlaps the second portions as viewed from a top-view perspective.

9. The semiconductor package structure as claimed in claim 1 , further comprising a plurality of conductive structures electrically coupled to the semiconductor die via the second RDL structure.

10. A semiconductor package structure, comprising:

a semiconductor die;

a first redistribution layer (RDL) structure on a non-active surface of the semiconductor die;

a second RDL structure on and electrically coupled to an active surface of the semiconductor die;

a ground layer in the first RDL structure;

a first molding compound layer on the first RDL structure;

a plurality of patch antennas, wherein each of the plurality of patch antennas comprises:

a first antenna element in the second RDL structure; and

a second antenna element on the first molding compound layer;

a metal isolation layer on the first molding compound layer to isolate the second antenna element of the plurality of patch antennas from each other; and

a first through via structure in the first molding compound layer and electrically coupled between the ground layer and the metal isolation layer,

wherein each of the first antenna element and the second antenna element has a first portion and a second portion adjoining the first portion, wherein each first portion overlaps the semiconductor die as viewed from a top-view perspective, wherein each of the first portions has a first edge and the first edges are aligned as viewed from the top-view perspective, and wherein each of the second portions has a second edge and the second edges are aligned as viewed from the top-view perspective.

11. The semiconductor package structure as claimed in claim 10 , wherein the ground layer has a plurality of through-openings, each through-opening respectively overlapping the second portion of the first antenna element of the plurality of patch antennas as viewed from a top-view perspective.

12. The semiconductor package structure as claimed in claim 10 , further comprising:

a second molding compound layer surrounding the semiconductor die; and

a second through via structure in the second molding compound layer and electrically coupled between the ground layer and the second RDL structure.

13. The semiconductor package structure as claimed in claim 12 , further comprising a dipole antenna in the second molding compound layer and electrically coupled to the ground layer by the second RDL structure and the second through via structure.

14. The semiconductor package structure as claimed in claim 12 , further comprising a plurality of dummy metal through via structures in the second molding compound layer and surrounding the semiconductor die.

15. The semiconductor package structure as claimed in claim 12 , further comprising a metal dam in the second molding compound layer and surrounding the semiconductor die.

16. The semiconductor package structure as claimed in claim 10 , further comprising a plurality of conductive structures electrically coupled to the semiconductor die via the second RDL structure.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 6, 2021
From: LIU, NAI-WEI; CHI, YEN-YAO; KAO, YEH-CHUN; YEH, SHIH-HUANG; LIN, TZU-HUNG; HSU, WEN-SUNG
To: MEDIATEK INC.
Reel/Frame 055840/0776 →
Continuity (2)
Provisional Application 62693501 · Jul 3, 2018
Related Publication 20200013735A1 · Jan 9, 2020