IP Library Granted Patent US 11,087,995
Granted Patent B1
US 11,087,995 · App. 17/222,960 · Granted Aug 10, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR); Deepak Sekar (Sunnyvale, CA)
Assignee: Monolithic 3D Inc.
H01L21/4871H01L21/823487H01L23/34H01L23/367H01L23/3677H01L23/49827H01L23/49838H01L23/5226H01L23/60H01L25/0657H01L25/50H01L27/0207H01L27/0248H01L27/0688H01L27/092H01L27/098H01L23/373H01L23/3732H01L2225/06527H01L2225/06541H01L2225/06589H01L2924/0002
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Quick Facts
Patent No.
US 11,087,995
App. No.
17/222,960
Granted
Aug 10, 2021
Kind
B1
Abstract

A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the third layer includes a crystalline layer, and where the second level includes a Radio Frequency (“RF”) circuit.

Claims (81)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one Radio Frequency circuit; and

a shielding layer disposed between said Radio Frequency circuit and said second layer.

2. The device according to claim 1 ,

wherein said second level comprises at least one Phase Lock Loop (“PLL) circuit.

3. The device according to claim 1 ,

wherein said second level comprises at least one SerDes circuit.

4. The device according to claim 1 , further comprising:

a heat removal path from said third level to an external surface of said device.

5. The device according to claim 1 ,

wherein said shielding layer reduces an electromagnetic noise effect on at least one of said first transistors.

6. The device according to claim 1 ,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls read operations of said at least one memory array.

7. The device according to claim 1 ,

wherein at least one of said second transistors is a FinFET type transistor.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said third layer comprises crystalline silicon, and

wherein said second level comprises an antenna.

9. The device according to claim 8 ,

wherein said second level comprises at least one PLL circuit.

10. The device according to claim 8 ,

wherein said second level comprises at least one SerDes circuit.

11. The device according to claim 8 ,

wherein at least one of said second transistors comprises a raised source and drain.

12. The device according to claim 8 ,

wherein said antenna supports transferring a signal in or out of said device.

13. The device according to claim 8 ,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls read operations of said memory array.

14. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

15. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said third layer comprises a crystalline layer, and

wherein said second level comprises a Radio Frequency (“RF”) circuit.

16. The device according to claim 15 , further comprising:

a heat removal path from said third level to an external surface of said device.

17. The device according to claim 15 ,

wherein said second level comprises at least one SerDes circuit.

18. The device according to claim 15 ,

wherein at least one of said second transistors comprises a raised source and drain.

19. The device according to claim 15 ,

wherein said second level comprises at least one memory array,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls at least part of data written to said memory array.

20. The device according to claim 15 ,

wherein at least one of said second transistors is a FinFET type transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 5, 2021
From: OR-BACH, ZVI; CRONQUIST, BRIAN; SEKAR, DEEPAK
To: MONOLITHIC 3D INC.
Reel/Frame 055829/0403 →
Continuity (9)
Continuation In Part 17115766 · Dec 8, 2020
Continuation In Part 17061563 · Oct 1, 2020
Continuation In Part 16114211 · Aug 28, 2018
Continuation In Part 15913917 · Mar 6, 2018
Continuation In Part 15470872 · Mar 27, 2017
Continuation In Part 13864245 · Apr 17, 2013
Continuation 13803437 · Mar 14, 2013
Continuation In Part 13731108 · Dec 30, 2012
Continuation 13730897 · Dec 29, 2012
Cited By (1)
US 12,622,014