Temporary bonding method with thermoplastic adhesive incorporating a rigid ring
View Patent ↗A method for the temporary bonding of a substrate of interest to a handle substrate, comprising a step of forming an assembly by placing the bonding faces of the substrate of interest and of the handle substrate into contact with one another via a thermoplastic polymer, and a step of treating the assembly at a treatment temperature that exceeds the glass transition temperature of the thermoplastic polymer. Prior to the assembly forming step, this method comprises: a step of producing, at the bonding face of one of either the substrate of interest or the handle substrate, a central cavity surrounded by a peripheral ring made of a material that is rigid at the treatment temperature, and a step of forming a layer of the thermoplastic polymer filling the central cavity.
1. A method of temporary bonding of a substrate of interest to a handle substrate, comprising:
a step of forming an assembly by placing bonding faces of the substrate of interest and of the handle substrate into contact with one another via a bonding layer made of a thermoplastic polymer having a glass transition temperature,
a step of treating the formed assembly at a treatment temperature that exceeds the glass transition temperature of the thermoplastic polymer,
wherein the method comprises, prior to the step of forming the assembly:
a step of producing, at the bonding face of one of either the substrate of interest or the handle substrate, a central cavity surrounded by a peripheral ring having an upper level and a lower level, the peripheral ring being made of a material that is rigid at the treatment temperature, and
a step of forming the bonding layer, said layer filling the central cavity once the assembly has been formed.
2. The method according to claim 1 , wherein the step of producing is carried out such that, once the assembly has been formed, said bonding layer extends above the upper level of the peripheral ring over the entire bonding face having the central cavity and the peripheral ring.
3. The method according to claim 1 , wherein the step of producing comprises thinning of a central part of one of either the substrate of interest or the handle substrate.
4. The method according to claim 1 , wherein the step of producing comprises depositing a band of said rigid material on a peripheral part of one of either the substrate of interest or the handle substrate.
5. The method according to claim 1 , wherein the step of producing comprises forming a layer of said rigid material on one of either the substrate of interest or the handle substrate and thinning a central part of the layer of said rigid material.
6. The method according to claim 1 , wherein the peripheral ring has a width that corresponds to at least 2.5%, preferably at least 5%, of a diameter of the bonding face of the substrate of interest.
7. The method according to claim 1 , wherein the rigid material has a Young's modulus greater than 1 MPa.
8. The method according to claim 1 , further comprising a step of trimming a peripheral part of the substrate of interest.
9. The method according to claim 1 , further comprising, after the step of forming the assembly, a step of thinning the substrate of interest and a step of separating the handle substrate from the thinned substrate of interest.