Semiconductor device
In some examples, a semiconductor device includes a substrate, an interlayer insulating film, a gate pad provided on the interlayer insulating film, a source electrode that is provided on the interlayer insulating film, source wiring provided on the interlayer insulating film, and gate wiring that is provided on the interlayer insulating film and is electrically connected to the gate pad. The size of the source wiring is not increased, and a high impurity concentration region having a higher impurity concentration than a drift layer is formed on the surface of the substrate at a location directly below the gate pad.
1. A semiconductor device, comprising:
a substrate;
an interlayer insulating film provided on the substrate;
a gate pad provided on the interlayer insulating film;
a source electrode that is provided on the interlayer insulating film and is opposed to a part of the gate pad in plan view;
source wiring having a linear shape that is provided on the interlayer insulating film, is not opposed to the source electrode but is opposed to a part of the gate pad in plan view, and is connected to the source electrode; and
gate wiring that is provided on the interlayer insulating film and is electrically connected to the gate pad,
wherein the substrate includes a drift layer of a first conductivity type, a well layer of a second conductivity type provided on the drift layer, and a high impurity concentration region provided on the well layer at a location directly below the gate wiring and the gate pad,
the first conductivity type impurity concentration of the high impurity concentration region is higher than the first conductivity type impurity concentration of the drift layer, and
the source wiring and the gate wiring provide one frame that surrounds the source electrode in plan view.
2. The semiconductor device according to claim 1 , further comprising:
polysilicon that is provided in the interlayer insulating film and connects the gate pad and the gate wiring to each other,
wherein the source wiring is in contact with the source electrode at opposite ends thereof in plan view.
3. The semiconductor device according to claim 1 , wherein the gate pad is arranged at a corner of the source electrode.
4. The semiconductor device according to claim 1 , wherein the gate wiring is in contact with the gate pad at one end thereof.
5. The semiconductor device according to claim 4 , wherein the gate wiring is in contact with an end of the gate pad.
6. The semiconductor device according to claim 4 , wherein the gate pad is arranged at a corner of the source electrode.
7. The semiconductor device according to claim 1 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
8. The semiconductor device according to claim 1 , further comprising:
a temperature sensing diode that is provided on the substrate;
a temperature sensing pad that is provided on the substrate and is in contact with the temperature sensing diode; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the temperature sensing pad in plan view, and is connected to the source electrode.
9. The semiconductor device according to claim 1 , further comprising:
a gate liner connected to the gate pad,
wherein the high impurity concentration region is provided directly below the gate liner.
10. The semiconductor device according to claim 1 , wherein the substrate is made of a wide band gap semiconductor.
11. The semiconductor device according to claim 10 , wherein the wide band gap semiconductor is silicon carbide, a gallium nitride-based material, or diamond.
12. The semiconductor device according to claim 2 , wherein the gate pad is arranged at a corner of the source electrode.
13. The semiconductor device according to claim 5 , wherein the gate pad is arranged at a corner of the source electrode.
14. The semiconductor device according to claim 2 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
15. The semiconductor device according to claim 3 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
16. The semiconductor device according to claim 4 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
17. The semiconductor device according to claim 5 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
18. The semiconductor device according to claim 6 , further comprising:
a current sensing pad that is provided on the substrate, the current sensing pad is configured to pass a part of a principal current of the substrate; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the current sensing pad in plan view, and is connected to the source electrode.
19. The semiconductor device according to claim 2 , further comprising:
a temperature sensing diode that is provided on the substrate;
a temperature sensing pad that is provided on the substrate and is in contact with the temperature sensing diode; and
a source extension part having a linear shape that is provided on the substrate, is not opposed to the source electrode but is opposed to a part of the temperature sensing pad in plan view, and is connected to the source electrode.