IP Library Granted Patent US 11,088,151
Granted Patent B2
US 11,088,151 · App. 16/589,806 · Granted Aug 10, 2021

4Cpp SRAM cell and array

Inventors: Hidehiro Fujiwara (Hsinchu, TW); Chia-En Huang (Hsinchu, TW); Yen-Huei Chen (Hsinchu, TW); Yih Wang (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H01L27/1104G11C5/063H01L27/0924H01L29/66795H01L29/785
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Quick Facts
Patent No.
US 11,088,151
App. No.
16/589,806
Granted
Aug 10, 2021
Kind
B2
Abstract

A static random access memory (SRAM) cell includes a four-contact polysilicon pitch (4Cpp) fin field effect transistor (FinFET) architecture including a first bit-cell and a second bit cell. The SRAM cell includes a first bit line and a first complementary bit line, wherein the first bit line and the first complementary bit line are shared by the first and second bit-cells of the SRAM cell. The SRAM cell includes a first word line connected to the first bit cell, and a second word line connected to the second bit cell.

Claims (74)

1. A static random access memory (SRAM) cell, comprising:

a first four-contact polysilicon pitch (4Cpp) fin field effect transistor (FinFET) architecture forming a first bit-cell;

a second 4Cpp FinFET architecture forming a second bit-cell;

a first bit line and a first complementary bit line, wherein the first bit line and the first complementary bit line are shared by the first and second bit-cells of the SRAM cell;

a first word line connected to the first bit-cell; and

a second word line connected to the second bit-cell.

2. The SRAM cell of claim 1 , wherein the first bit-cell comprises:

first, second, third and fourth polysilicon structures, wherein the first word line is connected to the first and second polysilicon structures;

a first pass gate transistor having a gate including the first polysilicon structure, and a source/drain (S/D) contact connected to the first bit line; and

a second pass gate transistor having a gate including the second polysilicon structure, and a S/D contact connected to the first complementary bit line; and

wherein the second bit-cell comprises:

first, second, third and fourth polysilicon structures, wherein the second word line is connected to the first and second polysilicon structure;

a first pass gate transistor having a gate formed by the first polysilicon structure, and a source contact connected to the first bit line; and

a second pass gate transistor having a gate contact formed by the second polysilicon structure and a source contact connected to the first complementary bit line.

3. The SRAM cell of claim 2 , wherein the first bit-cell further comprises:

a first inverter comprising first and second transistors each having a gate including the third polysilicon structure and a S/D contact connected to a S/D contact of the first pass gate transistor; and

a second inverter comprising third and fourth transistors each having a gate including the fourth polysilicon structure and a S/D contact connected to a S/D contact of the second pass gate transistor; and

wherein the second bit-cell further comprises:

a first inverter comprising first and second transistors each having a gate including the third polysilicon structure and a S/D contact connected to a S/D contact of the first pass gate transistor; and

a second inverter comprising third and fourth transistors each having a gate including the fourth polysilicon structure and a S/D contact connected to a S/D contact of the second pass gate transistor.

4. The SRAM cell of claim 3 , wherein the first bit line comprises a first metal line in a second metal layer, and wherein the first complementary bit line comprises a second metal line in the first metal layer.

5. The SRAM cell of claim 4 , wherein the first word line comprises a first metal line in a second metal layer, and wherein the second word line comprises a second metal line in the second metal layer.

6. The SRAM cell of claim 5 , wherein the first bit-cell further comprises a first contact in the first metal layer, the first and second polysilicon structures of the first bit-cell being connected to the first contact and the first contact being connected to the first metal line in the second metal layer, and wherein the second bit-cell further comprises a second contact in the first metal layer, the first and second polysilicon structures of the second bit-cell being connected to the second contact and the second contact being connected to the second metal line in the second metal layer.

7. The SRAM cell of claim 3 , wherein each of the first and second polysilicon structures of each of the first and second bit-cells include a continuous poly on diffusion edge (CPODE) pattern.

8. The SRAM cell of claim 3 , further comprising:

a second bit line and a second complementary bit line, wherein the second bit line and the second bit complementary line are shared by the first and second bit-cells of the SRAM cell;

a third word line connected to the first bit-cell; and

a fourth word line connected to the second bit-cell.

9. A method of forming a static random access memory (SRAM) cell comprising:

forming a first four contact polysilicon pitch (4Cpp) fin field effect transistor (FinFET) architecture including a first bit-cell;

forming a second 4Cpp FinFET architecture including a second bit-cell;

connecting a first bit line to each of the first and second bit-cells;

connecting a first complementary bit line to each of the first and second bit-cells;

connecting a first word line to the first bit-cell; and

connecting a second word line to the second bit-cell.

10. The method of claim 9 wherein forming the first bit-cell comprises:

forming first, second, third and fourth polysilicon structures in the first bit-cell;

forming a first pass gate transistor having a gate including the first polysilicon structure; and

forming a second pass gate transistor having a gate including the second polysilicon structure; and

wherein forming the second bit-cell comprises:

forming first, second, third and fourth polysilicon structures in the first bit-cell;

forming a first pass gate transistor having a gate including the first polysilicon structure; and

forming a second pass gate transistor having a gate including the second polysilicon structure.

11. The method of claim 10 wherein connecting the first bit line to each of the first and second bit-cells further comprises connecting each of the first polysilicon structures of each of the first and second bit-cells to the first bit line, and wherein connecting the first complementary bit line to each of the first and second bit-cells further comprises connecting each of the second polysilicon structures of each of the first and second bit-cells to the first complementary bit line.

12. The method of claim 11 wherein forming the first bit-cell further comprises:

forming a first inverter comprising first and second transistors each having a gate including the third polysilicon structure and a source/drain (S/D) contact connected to a S/D contact of the first pass gate transistor; and

forming a second inverter comprising third and fourth transistors each having a gate including the fourth polysilicon structure and a S/D contact connected to a S/D contact of the second pass gate transistor; and

wherein the forming the second bit-cell further comprises:

forming a first inverter comprising first and second transistors each having a gate including the third polysilicon structure and a S/D contact connected to a S/D contact of the first pass gate transistor; and

forming a second inverter comprising third and fourth transistors each having a gate including the fourth polysilicon structure and a S/D contact connected to a S/D contact of the second pass gate transistor.

13. The method of claim 12 , wherein the first bit line comprises a first metal line in a first metal layer, and wherein the first complementary bit line comprises a second metal line in the first metal layer.

14. The method of claim 13 , wherein the first word line comprises a first metal line in a second metal layer, and wherein the second word line comprises a second metal line in the second metal layer.

15. The method of claim 14 , wherein connecting the first word line to the first bit-cell further comprises:

forming a first contact in the first metal layer;

connecting the first and second polysilicon structures of the first bit-cell to the first contact; and

connecting the first contact to the first metal line in the second metal layer;

wherein connecting the second word line to the second bit-cell further comprises:

forming a second contact in the first metal layer;

connecting the first and second polysilicon structures of the second bit-cell to the second contact; and

connecting the second contact to the second metal line in the second metal layer.

16. The method of claim 11 , wherein each of the first and second polysilicon structures of each of the first and second bit-cells include a continuous poly on diffusion edge (CPODE) pattern.

17. The method of claim 16 further comprising:

connecting a second bit line to each of the first and second bit-cells;

connecting a second complementary bit line to each of the first and second bit-cells;

connecting a third word line to the first bit-cell; and

connecting a fourth word line to the second bit ccllbit-cell.

18. A memory array comprising:

a plurality of memory cells arranged in a plurality rows and columns, each of the plurality of memory cells comprising a first four contact polysilicon pitch (4Cpp) field effect transistor (FinFET) architecture including a first bit-cell and a second 4Cpp FinFET architecture including a second bit-cell;

a plurality of complementary bit line pairs, wherein each of the first and second bit-cells of each of the plurality of memory cells in a first row of the memory array share a first complementary bit line pair and each of the first and second bit-cells of each of the plurality of memory cells in a second row of the memory array share a second complementary bit line pair.

19. The memory array of claim 18 , further comprising:

a plurality of word lines, wherein each of the first bit-cells of each of the plurality of memory cells in a first column of the memory array share a first word line and each of the second bit-cells of each of the plurality of memory cells in the first column of the memory array share a second word line, and

wherein each of the first bit-cells of each of the plurality of memory cells in a second column of the memory array share a third word line and each of the second bit-cells of each of the plurality of memory cells in the second column of the memory array share a fourth word line.

20. The memory array of claim 18 , further comprising:

a plurality of word lines, wherein each of the first bit-cells of each of the plurality of memory cells in a first row of the memory array share a first word line with the second bit-cells of each of the plurality of memory cells in an adjacent second row and each of the second bit-cells of each of the plurality of memory cells in the first row of the memory array share a second word line with the first bit-cells of each of the plurality of memory cells in the adjacent second row.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 30, 2021
From: FUJIWARA, HIDEHIRO; HUANG, CHIA-EN; CHEN, YEN-HUEI; WANG, YIH
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 056093/0024 →
Continuity (1)
Related Publication 20210098467A1 · Apr 1, 2021
Cited By (2)
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