IP Library Granted Patent US 11,088,319
Granted Patent B2
US 11,088,319 · App. 16/685,415 · Granted Aug 10, 2021

Magnetic tunnel junction including a free layer structure and magnetic memory device comprising the same

Inventors: Kwang Seok Kim (Seoul, KR); Young Man Jang (Hwaseong-si, KR); Ung Hwan Pi (Hwaseong-si, KR)
Assignee: Samsung Electronics Co., Ltd.
H01L43/10G11C11/161G11C11/1659H01L27/228H01L43/02H01F10/3286
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Quick Facts
Patent No.
US 11,088,319
App. No.
16/685,415
Granted
Aug 10, 2021
Kind
B2
Abstract

In one embodiment, the magnetic memory device includes a free layer structure having a variable magnetization direction. The free layer structure includes a first free layer, the first free layer being a first Heusler alloy; a coupling layer on the first free layer, the coupling layer including a metal oxide layer; and a second free layer on the metal oxide layer, the second free layer being a second Heusler alloy, the second Heusler alloy being different from the first Heusler alloy.

Claims (42)

1. A magnetic memory device, comprising:

a free layer structure having a variable magnetization direction, the free layer structure including,

a first free layer, the first free layer being a first Heusler alloy,

a coupling layer on the first free layer, the coupling layer including a metal oxide layer, the coupling layer configured to induce a perpendicular magnetic anisotropy in the first free layer, and

a second free layer on the metal oxide layer, the second free layer being a second Heusler alloy, the second Heusler alloy being different from the first Heusler alloy;

a pinned layer structure, the pinned layer structure having a fixed magnetization direction; and

a tunnel barrier layer between the pinned layer structure and the free layer structure.

2. The magnetic memory device of claim 1 , wherein a magnetic coupling strength between the first free layer and the second free layer is 0.05-1 erg/cm2.

3. The magnetic memory device of claim 2 , wherein a thickness of the metal oxide layer is less than or equal to 1.5 nm.

4. The magnetic memory device of claim 3 , wherein the metal oxide layer includes Mg, Al, Hf, Zr, Ta, Nb or combinations thereof.

5. The magnetic memory device of claim 1 , wherein a thickness of the metal oxide layer is less than or equal to 1.5 nm.

6. The magnetic memory device of claim 5 , wherein the metal oxide layer includes Mg, Al, Hf, Zr, Ta, Nb or combinations thereof.

7. The magnetic memory device of claim 1 , wherein the first free layer has a cubic structure.

8. The magnetic memory device of claim 1 , wherein the first free layer has a saturation magnetization of 1200 emu/cc or less.

9. The magnetic memory device of claim 1 , wherein the first free layer has a saturation magnetization of 500-1200 emu/cc.

10. The magnetic memory device of claim 1 , wherein the first free layer has a tunneling magnetoresistance ratio at room temperature of greater than 100%.

11. The magnetic memory device of claim 1 , wherein the first free layer has thickness of 5 nm or less.

12. The magnetic memory device of claim 1 , wherein the first free layer has the structure X2YZ, where X═Mn, Fe, Co, Ni, Cu, Ru, Rh, Pd, Ad, Cd, Ir, Pt, Au, or Mg; Y═Be, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Zn, Y, Zr, Nb, Mo, Hf, W, La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, Tm, Yb, or Lu; and Z═Mg, B, Al, Si, Zn, Ga, Ge, As, In, Sn, Sb, Pb, or Bi.

13. The magnetic memory device of claim 1 , wherein the first free layer includes cobalt.

14. The magnetic memory device of claim 1 , wherein the second free layer has a tetragonal structure.

15. The magnetic memory device of claim 1 , wherein the second free layer has a saturation magnetization of less than or equal to 500 emu/cc.

16. The magnetic memory device of claim 1 , wherein the second free layer has a thickness of 10 nm or less.

17. The magnetic memory device of claim 1 , wherein the second free layer includes one of cobalt, nickel, iron, manganese or a combination thereof.

18. The magnetic memory device of claim 17 , wherein the second free layer is Mn3X, where X═Ge, Ga, Sb, Al, or combinations thereof.

19. A magnetic memory device, comprising:

a pinned layer structure, the pinned layer structure having a fixed magnetization direction, the pinned layer structure including,

a first pinned layer,

a non-magnetic layer, and

a second pinned layer, the first pinned layer and the second pinned layer having anti-parallel magnetization directions;

a free layer structure having a variable magnetization direction, the free layer structure including,

a first free layer, the first free layer being a first Heusler alloy, having a cubic structure, and having a first saturation magnetization,

a metal oxide layer on the first free layer, and

a second free layer on the metal oxide layer, the second free layer being a second Heusler alloy having a tetragonal structure and having a second saturation magnetization, the second saturation magnetization being less than the first saturation magnetization, and a magnetic coupling strength between the first free layer and second free layer is 0.05-1 erg/cm2; and

a tunnel barrier layer between the pinned layer structure and the free layer structure.

20. A magnetic memory device, comprising:

a free layer structure having a variable magnetization direction, the free layer structure including,

a first free layer, the first free layer being a first Heusler alloy,

a coupling layer on the first free layer, the coupling layer including a metal oxide layer, and

a second free layer on the metal oxide layer, the second free layer being a second Heusler alloy, the second Heusler alloy being different from the first Heusler alloy;

a pinned layer structure, the pinned layer structure having a fixed magnetization direction; and

a tunnel barrier layer between the pinned layer structure and the free layer structure,

wherein a magnetic coupling strength between the first free layer and the second free layer is 0.05-1 erg/cm2.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2019
From: KIM, KWANG SEOK; JANG, YOUNG MAN; PI, UNG HWAN
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 051036/0052 →
Priority Claims (1)
KR 10-2019-0013435 · Feb 1, 2019 · national
Continuity (1)
Related Publication 20200251650A1 · Aug 6, 2020
Cited By (2)
US 12,190,928 US 12,575,330