Composition for removing photoresist residue and/or polymer residue
To provide a composition for removing photoresist residue and/or polymer residue formed in a process for producing a semiconductor circuit element, and a removal method employing same. A composition for removing photoresist residue and/or polymer residue, the composition containing saccharin and water, and the pH being no greater than 9.7.
1. A composition for removing photoresist residue and/or polymer residue after dry etching or wet etching using a photoresist as a mask, the composition consisting of saccharin; water; and two or more types of substance selected from the group consisting of (A) a water-soluble solvent, (B) an acid, and (C) a dissociable nitrogen-containing compound; and the pH being no greater than 9.7; and wherein the composition comprises neither fluorine compounds, hydroxylamine compounds, hydrochloric acid, nor sulfuric acid.
2. The composition according to claim 1 , wherein the content of saccharin is at least 0.01 mass %.
3. A method for removing photoresist residue and/or polymer residue, the method employing the composition according to claim 1 .
4. A method for producing a semiconductor circuit element having metal wiring, the method comprising a step of removing photoresist residue and/or polymer residue remaining on a metal wiring-forming structure using the composition according to claim 1 .
5. A semiconductor circuit element produced by the method according to claim 4 .
6. A composition for removing photoresist residue and/or polymer residue after dry etching or wet etching using a photoresist as a mask, the composition consisting of saccharin; water; two or more types of substance selected from the group consisting of (A) a water-soluble solvent, (B) an acid, and (C) a dissociable nitrogen-containing compound; and one or more types of substance selected from the group consisting of (D) a cationic, anionic, or nonionic surfactant, and (E) D-sorbitol; and the pH being no greater than 9.7; and wherein the composition comprises neither fluorine compounds, hydroxylamine compounds, hydrochloric acid, nor sulfuric acid.
7. The composition according to claim 6 , wherein the content of saccharin is at least 0.01 mass %.
8. A method for removing photoresist residue and/or polymer residue, the method employing the composition according to claim 6 .
9. A method for producing a semiconductor circuit element having metal wiring, the method comprising a step of removing photoresist residue and/or polymer residue remaining on a metal wiring-forming structure using the composition according to claim 6 .
10. A semiconductor circuit element produced by the method according to claim 9 .