Plasma processing apparatus

1. A plasma processing apparatus for performing plasma processing on a target object, comprising:

a processing chamber;

a mounting table provided in the processing chamber, the mounting table having a mounting region on which the target object is mounted;

a baffle structure provided belowthe mounting region and between the mounting table and the processing chamber, the baffle structure defining a first space including the mounting region and a second space belowthe mounting region in the processing chamber, wherein the baffle structure includes:

a first member having a first cylindrical part extending between the mounting table and the processing chamber and having a plurality of through-holes elongated in a vertical direction, wherein the first cylindrical part extends in a circumferential direction around the mounting table, and the plurality of through-holes are positioned along the first cylindrical part in the circumferential direction, and

a second member having a second cylindrical part having an inner diameter greater than an outer diameter of the first cylindrical part;

a gas supply unit connected to the first space;

a gas exhaust unit connected to the second space; and

a driving unit configured to vertically move the second cylindrical part in a region including a gap between the first member and the processing chamber,

wherein the first member includes a lower annular part and an upper annular part,

wherein the upper annular part of the first member is supportedby a sidewall of the processing chamber and the lower annular part of the first member is supportedby the mounting table,

wherein when the second cylindrical part is in a vertical position in which the second cylindrical part fully faces and shields the through-holes of the first cylindrical part, the first space communicates with the second space via the through-holes and a gap in a diametrical direction between the first cylindrical part and the second cylindrical part,

wherein the second cylindrical part does not have through-holes such that when the second cylindrical part fully faces and shields the through-holes of the first cylindrical part, conductance between the first space and the second space is through the gap between the first cylindrical part and the second cylindrical part, and wherein the second member includes an annular part extending from a lower end of the second cylindrical part in a diametrically outward direction at a location below a location at which the upper annular part of the first member is supported by the sidewall of the processing chamber such that, when the second cylindrical part is in a vertical position in which the second cylindrical part does not face the through-holes of the first cylindrical part, the first space communicates with the second space through the through-holes of the first cylindrical part and between the sidewall of the chamber and the annular part extending from the lower end of the second cylindrical part.

2. The plasma processing apparatus of claim 1 , further comprising a control unit configured to control the driving unit,

wherein the control unit performs:

first control in which the driving unit is controlled to set a vertical position of the second member to a first position, and

second control in which the driving unit is controlled to set a vertical position of the second member to a second position different from the first position.

3. The plasma processing apparatus of claim 2 , wherein the control unit controls the gas supply unit to supply a first gas during the first control and to supply a second gas different from the first gas during the second control.

4. The plasma processing apparatus of claim 1 , wherein the sidewall of the processing chamber includes an upper part and a lower part, and

wherein the plasma processing apparatus further comprises a supporting member having an upper part interposed between the upper part and the lower part of the sidewall and lower part to which the upper annular part of the first member is fixed.

5. The plasma processing apparatus of claim 3 , wherein the first gas includes a deposition gas and the second gas includes a corrosion gas.

6. The plasma processing apparatus of claim 1 , wherein a length in a diametrical direction of the gap between the first cylindrical part and the second cylindrical part is set for obtaining a predetermined conductance between the first space and the second space when the second cylindrical part is in the vertical position in which the second cylindrical part fully faces the through-holes of the first cylindrical part, and

wherein the length in the diametrical direction of the gap between the first cylindrical part and the second cylindrical part is set to 0.4 mm.