Manufacturing method of sensing module for optical fingerprint sensor
A manufacturing method of a sensing module for an optical fingerprint sensor is provided. A plurality of photo detectors are formed in a light sensing layer. The photo detectors are arranged in a sensing array. A plurality of collimators are formed in a light filter layer. The collimators are divided into a plurality of collimator groups corresponding to the photo detectors. The collimator groups are arranged in a collimator group array. The light sensing layer is attached to the light filter layer so that the light filter layer is disposed on the light sensing layer and the collimator group array of the light filter layer is aligned with the sensing array of the light sensing layer. Each of the collimator groups corresponds to one of the photo detectors, and aligned with and disposed above the corresponding photo detector. Each of the collimator groups comprises the same number of collimators arranged in a specific pattern.
1. A manufacturing method of a sensing module for an optical fingerprint sensor, comprising:
forming a plurality of photo detectors in a light sensing layer, wherein the photo detectors are arranged in a sensing array;
forming a plurality of collimators in a light filter layer, wherein the collimators are divided into a plurality of collimator groups respectively corresponding to the photo detectors and the collimator groups are arranged in a collimator group array; and
attaching the light sensing layer to the light filter layer so that the light filter layer is disposed above the light sensing layer and the collimator group array of the light filter layer is aligned with the sensing array of the light sensing layer, wherein the collimator groups of the collimator group array are respectively corresponding to the photo detectors of the sensing array and each of the collimator groups corresponds to one of the photo detectors;
wherein the collimators in each of the collimator groups are arranged in a specific pattern and disposed above the corresponding photo detector,
wherein the specific patterns of two adjacent ones of the collimator groups are different,
wherein a first distance between two adjacent collimators separately located at the two adjacent ones of the collimator groups having the different specific patterns is equal to a second distance between two adjacent collimators located at the same collimator group.
2. The manufacturing method as claimed in claim 1 , wherein in each of the collimator groups, a distance between any two adjacent ones of the collimators is identical.
3. The manufacturing method as claimed in claim 1 , wherein each of the collimator groups comprises the same number of collimators arranged in the same specific pattern.
4. The manufacturing method as claimed in claim 1 , wherein each of the collimator groups comprises a center collimator and a plurality of peripheral collimators surrounding the center collimator.
5. The manufacturing method as claimed in claim 4 , wherein the peripheral collimators are equidistant from the center collimator.
6. The manufacturing method as claimed in claim 1 , wherein the ratio of a diameter to height of the collimators is between 1:3 and 1:30 and the diameter of the collimators is between 1 and 20 micrometers.
7. The manufacturing method as claimed in claim 1 , wherein a diameter of the collimator is greater than the first and second distances.
8. A manufacturing method of a sensing module for an optical fingerprint sensor, comprising:
forming a plurality of photo detectors in a light sensing layer, wherein the photo detectors are arranged in a sensing array;
forming a plurality of collimators in a light filter layer, wherein the collimators are divided into a plurality of first collimator groups with a first pattern and a plurality of second collimator groups with a second pattern that is different from the first pattern, and the first and second collimator groups are arranged in a collimator group array; and
attaching the light sensing layer to the light filter layer so that the light filter layer is disposed above the light sensing layer and the collimator group array of the light filter layer is aligned with the sensing array of the light sensing layer, wherein the first and second collimator groups are respectively aligned with the photo detectors and each of the first and second collimator groups corresponds to one of the photo detectors;
wherein the total number of the first and second collimator groups is equal to the number of the photo detectors,
wherein a first distance between two adjacent collimators separately located at adjacent first and second collimator groups is equal to a second distance between two adjacent collimators located at the first or second collimator group.
9. The manufacturing method as claimed in claim 8 , wherein in each of the first and second collimator groups, a distance between any two adjacent ones of the collimators is identical.
10. The manufacturing method as claimed in claim 8 , wherein the second pattern is obtained by rotating the first pattern by a specific angle.
11. The manufacturing method as claimed in claim 8 , wherein the step of forming the collimators in the light filter layer further comprises:
alternately arranging the first collimator groups and the second collimator groups in each row or each column of the collimator group array.
12. The manufacturing method as claimed in claim 8 , wherein each of the first and second collimator groups comprises a center collimator and a plurality of peripheral collimators surrounding the center collimator.
13. The manufacturing method as claimed in claim 12 , wherein the peripheral collimators are equidistant from the center collimator.
14. The manufacturing method as claimed in claim 8 , wherein the ratio of a diameter to height of the collimators is between 1:3 and 1:30 and the diameter of the collimators is between 1 and 20 micrometers.
15. The manufacturing method as claimed in claim 8 , wherein a diameter of the collimator is greater than the first and second distances.