IP Library › Granted Patent US 11,107,615
Granted Patent B2
US 11,107,615 · App. 16/069,347 · Granted Aug 31, 2021

Magnetization rotational element, magnetoresistance effect element, and memory device

Inventors: Tohru Oikawa (Tokyo, JP); Tomoyuki Sasaki (Tokyo, JP); Yohei Shiokawa (Tokyo, JP); Tatsuo Shibata (Tokyo, JP)
Assignee: TDK CORPORATION
H01F10/329G11C11/161H01F10/3254H01L43/02H01L43/10
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Quick Facts
Patent No.
US 11,107,615
App. No.
16/069,347
Granted
Aug 31, 2021
Kind
B2
Abstract

A magnetization rotational element includes a ferromagnetic metal layer, and a spin-orbit torque wiring extending in a first direction intersecting a lamination direction of the ferromagnetic metal layer and having the ferromagnetic metal layer positioned on one surface thereof, in which a direction of spin injected from the spin-orbit torque wiring into the ferromagnetic metal layer intersects a magnetization direction of the ferromagnetic metal layer, and a damping constant of the ferromagnetic metal layer is larger than 0.01.

Claims (18)

1. A magnetization rotational element comprising:

a ferromagnetic metal layer;

a spin-orbit torque wiring extending in a first direction intersecting a lamination direction of the ferromagnetic metal layer, the ferromagnetic metal layer being positioned on one surface of the spin-orbit torque wiring; and

an insertion layer provided between the ferromagnetic metal layer and the spin-orbit torque wiring, wherein:

the insertion layer includes a heavy metal having a melting point of 2000° C. or higher or an alloy containing the heavy metal,

a film thickness of the insertion layer is less than a film thickness of one atomic layer thereof, and

the insertion layer includes a plurality of gaps.

2. The magnetization rotational element according to claim 1 , wherein a film thickness of the ferromagnetic metal layer is 4 nm or less.

3. A magnetoresistance effect element comprising:

the magnetization rotational element according to claim 1 ; and

a nonmagnetic layer and a second ferromagnetic metal layer laminated in this order on a surface of the ferromagnetic metal layer on a side opposite to the spin-orbit torque wiring.

4. A memory device comprising the magnetoresistance effect element according to claim 3 .

5. The magnetization rotational element according to claim 1 , wherein the heavy metal is selected from the group consisting of Ta, Ir, and W.

6. The magnetization rotational element according to claim 1 , wherein a direction of spin injected from the spin-orbit torque wiring into the ferromagnetic metal layer intersects a magnetization direction of the ferromagnetic metal layer.

7. The magnetization rotational element according to claim 6 , wherein the direction of the spin injected from the spin-orbit torque wiring into the ferromagnetic metal layer is inclined by 45° or more and 90° or less with respect to the magnetization direction of the ferromagnetic metal layer.

8. The magnetization rotational element according to claim 7 , wherein a film thickness of the ferromagnetic metal layer is 4 nm or less.

9. The magnetization rotational element according to claim 1 , wherein the film thickness of the insertion layer is an average film thickness.

10. The magnetization rotational element according to claim 1 , wherein the insertion layer is configured to transmit the spin from the spin-orbit torque wiring to the ferromagnetic metal layer via the plurality of gaps.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2018
From: OIKAWA, TOHRU; SASAKI, TOMOYUKI; SHIOKAWA, YOHEI; SHIBATA, TATSUO
To: TDK CORPORATION
Reel/Frame 047245/0954 →
Priority Claims (1)
JP JP2017-033053 · Feb 24, 2017 · national
Continuity (1)
Related Publication 20200168383A1 · May 28, 2020