Substrate treating method
An oxygen concentration is lowered in accordance with a set lowering process, and thereafter a heat treatment is performed. Accordingly, the heat treatment is performed to a substrate W while the oxygen concentration in a heat treating space HS is lowered. Consequently, a treatment atmosphere within the heat treating space is able to be made suitable for a heat treatment process, leading to appropriate film deposition. In addition, the oxygen concentration is lowered in accordance with a concentration level in recipes. This avoids an excessively lowered oxygen concentration, leading to prevention of reduced throughput.
1. A substrate treating method for performing a heat treatment to a substrate having a treated film formed thereon within a heat treating space of a heat treating chamber, the method comprising:
a setting step of setting a lowering process in accordance with a concentration level from recipes where conditions of treating the substrate are specified;
an oxygen concentration lowering step of lowering an oxygen concentration in the heat treating space in accordance with the set lowering process; and
a heat treatment step of performing the heat treatment to the substrate within the heat treating space after the setting step and the oxygen concentration lowering step: wherein the oxygen concentration lowering step includes an exhausting stet of exhausting gases within the heat treating space.
2. The substrate treating method according to claim 1 , wherein the oxygen concentration lowering step includes: the exhausting step of exhausting gases within the heat treating space; and an inert gas supplying step of supplying an inert gas into the heat treating space.
3. The substrate treating method according to claim 2 , wherein the exhausting step is performed from through holes through which support pins moving forward/backward from a heat treating plate are inserted.
4. The substrate treating method according to claim 2 , wherein
the exhausting step is performed from an exhaust port of a cover that surrounds a heat treating plate and through holes through which support pins moving forward/backward from the heat treating plate are inserted.
5. The substrate treating method according to claim 1 , wherein
the treated film is made from a directed self-assembly material.