IP Library Granted Patent US 11,107,713
Granted Patent B2
US 11,107,713 · App. 16/425,305 · Granted Aug 31, 2021

Conveying system and method for operating the same

Inventors: Fu-Hsien Li (Taichung, TW); Chi-Feng Tung (Miaoli County, TW); Hsiang Yin Shen (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H01L21/67242B65G49/07B66C7/08B66C13/18G05B19/41815H01L21/67727G05B2219/45031H01L21/67005
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Quick Facts
Patent No.
US 11,107,713
App. No.
16/425,305
Granted
Aug 31, 2021
Kind
B2
Abstract

A method includes providing a rail, a first conveying unit movably mounted on the rail, and a central controller configured to control the first conveying unit; displacing the first conveying unit along the rail at a first speed; obtaining a first vibration measurement upon the displacement of the first conveying unit along the rail at the first speed; analyzing the first vibration measurement; transmitting a first signal based on the analysis of the first vibration measurement to the central controller; providing a second conveying unit movably mounted on the rail; transmitting a first feedback signal based on the first signal from the central controller to the second conveying unit; and displacing the second conveying unit along the rail at a second speed based on the first feedback signal.

Claims (45)

1. A method, comprising:

providing a rail, a first conveying unit movably mounted on the rail, and a central controller configured to control the first conveying unit, wherein the first conveying unit includes a first housing, a first gripping member disposed inside the first housing, a first sensor disposed on the first gripping member, and a first unit controller disposed on the first gripping member;

displacing the first conveying unit along the rail at a first speed;

obtaining a first vibration measurement by the first sensor upon the displacement of the first conveying unit along the rail at the first speed;

analyzing the first vibration measurement by the first unit controller;

transmitting a first signal based on the analysis of the first vibration measurement from the first unit controller to the central controller;

providing a second conveying unit movably mounted on the rail, wherein the second conveying unit includes a second housing, a second gripping member disposed inside the second housing, a second sensor disposed on the second gripping member and a second unit controller disposed on the second gripping member;

transmitting a first feedback signal based on the first signal from the central controller to the second unit controller; and

displacing the second conveying unit along the rail at a second speed based on the first feedback signal,

wherein when the first vibration measurement is greater than a predetermined vibration threshold, the second speed is less than the first speed, and when the first vibration measurement is less than a predetermined vibration threshold, the second speed is greater than the first speed.

2. The method of claim 1 , wherein the first vibration measurement includes magnitudes and frequencies of a vibration of the first gripping member.

3. The method of claim 1 , wherein the parameters associated with the first conveying unit are different from parameters associated with the second conveying unit.

4. The method of claim 1 , wherein the first signal is wirelessly transmitted from the first unit controller to the central controller, and the first feedback signal is wirelessly transmitted from the central controller to the second unit controller.

5. The method of claim 1 , further comprising obtaining a second vibration measurement by the second sensor upon the displacement of the second conveying unit along the rail at the second speed, wherein the second vibration measurement is substantially less than or equal to the first vibration measurement.

6. The method of claim 1 , further comprising:

providing a third conveying unit movably mounted on the rail, wherein the third conveying unit includes a third housing, a third gripping member disposed inside the third housing, a third sensor disposed on the third gripping member and a third unit controller disposed on the third gripping member; and

displacing the third conveying unit along the rail at the second speed.

7. The method of claim 6 , wherein the second conveying unit and the third conveying unit are in same configurations.

8. The method of claim 1 , further comprising:

obtaining a second vibration measurement by the second sensor upon the displacement of the second conveying unit along the rail at the second speed;

providing a third conveying unit movably mounted on the rail, wherein the third conveying unit includes a third housing, a third gripping member disposed inside the third housing, a third sensor disposed on the third gripping member and a third unit controller disposed on the third gripping member;

transmitting a second signal based on the analysis of the second vibration measurement from the second unit controller to the central controller;

transmitting a second feedback signal based on the second signal from the central controller to the third unit controller; and

displacing the third conveying unit along the rail at a third speed based on the second feedback signal.

9. The method of claim 8 , wherein the second vibration measurement is greater than a predetermined vibration threshold, and the third speed is less than the second speed.

10. The method of claim 8 , wherein the second vibration measurement is less than a predetermined vibration threshold, and the third speed is greater than the second speed.

11. The method of claim 8 , further comprising obtaining a third vibration measurement by the third sensor upon the displacement of the third conveying unit along the rail at the third speed, wherein the third vibration measurement is substantially less than or equal to the second vibration measurement and the first vibration measurement.

12. A method, comprising:

providing a rail including a first section and a second section, a first conveying unit movably mounted on the rail and configured to displace along the first section at a first predetermined speed and along the second section at a second predetermined speed, and a central controller configured to control the first conveying unit;

deriving a first speed by increasing or decreasing the first predetermined speed based on a plurality of parameters associated with the first conveying unit and the first section of the rail;

displacing the first conveying unit along the first section of the rail at the first speed;

obtaining a first vibration measurement of the first conveying unit upon the displacement of the first conveying unit along the first section of the rail at the first speed;

deriving a second speed by increasing or decreasing the second predetermined speed based on the plurality of parameters associated with the first conveying unit; and

displacing the first conveying unit along the second section of the rail at the second speed;

obtaining a second vibration measurement of the first conveying unit upon the displacement of the first conveying unit along the second section of the rail at the second speed,

wherein the first vibration measurement and the second vibration measurement are substantially less than or equal to a predetermined vibration threshold.

13. The method of claim 12 , wherein a top cross section of the first section and a top cross section of the second section have different shapes.

14. The method of claim 12 , further comprising:

providing a second conveying unit movably mounted on the rail and configured to displace along the first section at the first predetermined speed;

deriving a third speed by the central controller based on a plurality of second parameters associated with the second conveying unit; and

displacing the second conveying unit along the first section of the rail at the third speed;

wherein the third speed is derived by increasing or decreasing the first predetermined speed and is substantially different from the first speed.

15. The method of claim 14 , further comprising:

obtaining a third vibration measurement of the second conveying unit upon the displacement of the second conveying unit along the first section of the rail at the third speed;

wherein the third vibration measurement is substantially less than or equal to the predetermined vibration threshold.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 8, 2019
From: LI, FU-HSIEN; TUNG, CHI-FENG; SHEN, HSIANG YIN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Reel/Frame 049692/0724 →
Continuity (1)
Related Publication 20200381277A1 · Dec 3, 2020
Cited By (1)
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