Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region
A method for operating a substrate processing system includes delivering precursor gas to a chamber using a showerhead that includes a head portion and a stem portion. The head portion includes an upper surface, a sidewall, a lower planar surface, and a cylindrical cavity and extends radially outwardly from one end of the stem portion towards sidewalls of the chamber. The showerhead is connected, using a collar, to an upper surface of the chamber. The collar is arranged around the stem portion. Process gas is flowed into the cylindrical cavity via the stem portion and through a plurality of holes in the lower planar surface to distribute the process gas into the chamber. A purge gas is supplied through slots of the collar into a cavity defined between the head portion and an upper surface of the chamber.
1. An apparatus comprising:
a showerhead collar that includes:
a collar stem portion,
a central cavity that extends through the center of the collar stem portion and is configured to receive a showerhead stem portion of a showerhead,
a plurality of slots that extend through an outer cylindrical side surface of the showerhead collar and into the collar stem portion, and
a plurality of first passages that extend through the collar stem portion in a direction parallel to the central cavity, and that are fluidically connected to the plurality of slots such that gas is configured to flow from the first passages to the plurality of slots.
2. The apparatus of claim 1 , wherein the first passages have a circular cross-section.
3. The apparatus of claim 2 , wherein the first passages are radially offset from the central cavity.
4. The apparatus of claim 2 , wherein:
the showerhead collar further comprises a cavity and an inner wall,
the cavity extends around the central cavity and the inner wall, is radially offset from the central cavity, and is partially defined by the inner wall, and
the cavity is fluidically connected to the plurality of first passages such that gas is configured to flow from the cavity, through the first passages, and to the plurality of slots.
5. The apparatus of claim 4 , wherein the showerhead collar further comprises a second passage that:
extends through a portion of the collar stem portion, and
is fluidically connected to the cavity such that gas is configured to flow from the second passage to the cavity, from the cavity to the plurality of first passages, and from the plurality of first passages to the plurality of slots.
6. The apparatus of claim 1 , wherein:
the central cavity is partially defined by a first plurality of surfaces arranged along a first circumference,
each first passage is fluidically connected to the central cavity and partially defined by an arcuate surface that curves radially outward, and
each arcuate surface spans between two of the first plurality of surfaces.
7. The apparatus of claim 1 , wherein:
the showerhead collar further comprises a second passage that extends through the collar stem portion,
the second passage is fluidically connected to the plurality of first passages such that gas is configured to flow from the second passage to the plurality of first passages, and from the plurality of first passages to the plurality of slots.
8. The apparatus of claim 1 , wherein the showerhead collar is a “T”-shaped cross section with a head portion larger in diameter than the collar stem portion.
9. The apparatus of claim 1 , further comprising the showerhead with the showerhead stem portion and a showerhead head portion, wherein the showerhead stem portion is positioned within the central cavity of the showerhead collar.