Integrated circuit device, oscillator, electronic apparatus, and vehicle
View Patent ↗An integrated circuit device includes a temperature sensor, a heat generation source circuit serving as a heat generation source, a pad for external coupling, and a capacitor having the MIM structure in which one electrode is electrically coupled to the pad for external coupling. In a plan view orthogonal to the substrate on which a circuit element is formed, the capacitor having the MIM structure and the temperature sensor overlap.
1. An integrated circuit device comprising:
a temperature sensor;
a heat generation source circuit serving as a heat generation source;
a pad for external coupling; and
a capacitor having a metal-insulator-metal (MIM) structure in which one electrode is electrically coupled to the pad for external coupling, wherein
the capacitor having the MIM structure and the temperature sensor overlap in a plan view orthogonal to a substrate on which a circuit element is formed.
2. The integrated circuit device according to claim 1 , wherein
the temperature sensor is disposed at a corner portion where two sides of the integrated circuit device intersect.
3. The integrated circuit device according to claim 1 , wherein
the temperature sensor is disposed along a first side of the integrated circuit device, and
the heat generation source circuit is disposed along a second side intersecting the first side of the integrated circuit device.
4. The integrated circuit device according to claim 1 , wherein
the pad for external coupling is a ground pad or a power supply pad.
5. The integrated circuit device according claim 1 , wherein
the pad for external coupling is a ground pad,
a ground voltage is supplied from the ground pad to the one electrode of the capacitor having the MIM structure, and
a power supply voltage from a power supply pad, a voltage generated from the power supply voltage, or a temperature detection voltage of the temperature sensor is supplied to the other electrode of the capacitor having the MIM structure.
6. The integrated circuit device according to claim 5 , wherein
the voltage generated from the power supply voltage is applied to the other electrode of the capacitor having the MIM structure, and
the voltage generated from the power supply voltage is a regulated voltage generated by a regulator to which the power supply voltage is supplied, or a reference voltage generated by a reference voltage generation circuit to which the power supply voltage is supplied.
7. The integrated circuit device according to claim 1 , wherein
the pad for external coupling is a ground pad,
the one electrode of the capacitor having the MIM structure is electrically coupled to a ground pad via a ground line,
the ground line is electrically coupled to the substrate via a metal plug, and
the metal plug is disposed between the temperature sensor and the heat generation source circuit in the plan view.
8. The integrated circuit device according to claim 1 , wherein
the temperature sensor includes a bipolar transistor and a resistor, and
the capacitor having the MIM structure and the bipolar transistor overlap in the plan view.
9. The integrated circuit device according to claim 1 , further comprising:
an oscillation circuit that generates an oscillation signal by oscillating a vibrator; and
an output circuit that buffers the oscillation signal from the oscillation circuit and outputs a clock signal, wherein
the heat generation source circuit is the output circuit.
10. The integrated circuit device according to claim 9 , further comprising:
a first pad electrically coupled to one end of the vibrator; and
a second pad electrically coupled to the other end of the vibrator, wherein
a distance between the temperature sensor and the first pad is shorter than a distance between the temperature sensor and the output circuit.
11. The integrated circuit device according to claim 1 , further comprising:
an oscillation circuit that generates an oscillation signal by oscillating a vibrator;
an output circuit that buffers the oscillation signal from the oscillation circuit and outputs a clock signal;
a first pad electrically coupled to one end of the vibrator; and
a second pad electrically coupled to the other end of the vibrator, wherein
the heat generation source circuit is the output circuit,
the temperature sensor, the first pad, and the second pad are disposed along a first side of the integrated circuit device, and
the output circuit is disposed along a second side of the integrated circuit device that intersects the first side.
12. An integrated circuit device comprising:
a temperature sensor;
a heat generation source circuit serving as a heat generation source;
a pad for external coupling which is a ground pad or a power supply pad; and
a capacitor having a metal-insulator-metal (MIM) structure in which one electrode is electrically coupled to the pad for external coupling, wherein
the capacitor having the MIM structure and the heat generation source circuit overlap in a plan view orthogonal to a substrate on which a circuit element is formed.
13. An oscillator comprising:
the integrated circuit device according to claim 9 ; and
the vibrator.
14. An electronic apparatus comprising:
the integrated circuit device according to claim 1 ; and
a processing device that performs processing based on an output signal from the integrated circuit device.
15. A vehicle comprising:
the integrated circuit device according to claim 1 ; and
a processing device that performs processing based on an output signal from the integrated circuit device.