Self-assembly composition for pattern formation and pattern forming method

1. A self-assembly composition for pattern formation, which comprises a block copolymer comprising

a polymerization unit (a) having at least one selected from a structure represented by the following formula ( 103 ) and a structure represented by the following formula ( 104 ), and

a polymerization unit (b) having a structure represented by the following formula ( 105 ), wherein

the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less based on the total mass of the block copolymer:

wherein, in the formulae ( 103 ) and ( 104 ), R 1 each independently represents a hydrogen atom, an alkyl group, an acyl group, an aryl group, or a phosphoryl group, and a plurality of R 1 may be identical to or different from one another; R 5 represents a hydrogen atom or an alkyl group, and a plurality of R 5 may be identical to or different from one another; X 1 and Y 1 each independently represent a single bond or a linking group, a plurality of X 1 may be identical to or different from one another, and a plurality of Y 1 may be identical to or different from one another; p represents an integer of 2 or more and 1500 or less, r represents an integer of 0 or more, and at least one of a plurality of r represents an integer of 1 or more; and the symbol * represents a binding site with any one of R 1 , when r represents 2 or more, or represents a binding site with any one oxygen atom to which R 1 binds, instead of R 1 ; and

in the formula (105), W 1 represents a carbon atom or a silicon atom, and a plurality of W 1 may be identical to or different from one another; W 2 represents —CR 2 —, —O—, —S—, or —SiR 2 — (provided that R represents a hydrogen atom or an alkyl group containing 1 to 5 carbon atoms, and a plurality of R may be identical to or different from one another), and a plurality of W 2 may be identical to or different from one another; R 11 represents a hydrogen atom, a methyl group, or a hydroxyl group, and a plurality of R 11 may be identical to or different from one another; R 12 represents a phenyl group; and q represents an integer of 2 or more and 3000 or less.

2. The self-assembly composition for pattern formation according to claim 1 , wherein solubility of the block copolymer in at least one selected from propylene glycol monomethyl ether acetate (PGMEA) and dimethylformamide (DMF) is 0.8% by mass or more.

3. The self-assembly composition for pattern formation according to claim 1 , wherein the r represents an integer of 0 or more, and at least one of a plurality of r represents an integer of 1 or more and 10 or less.

4. The self-assembly composition for pattern formation according to claim 1 , which further comprises an organic solvent.

5. The self-assembly composition for pattern formation according to claim 1 , which further comprises an ionic liquid.

6. A pattern forming method, comprising

applying the self-assembly composition for pattern formation according to claim 1 onto a substrate, so as to form a self-assembly film according to self-assembly phase separation, and

subjecting to etching.

7. The pattern forming method according to claim 6 , wherein the etching is a dry etching.

8. The pattern forming method according to claim 6 which further comprises forming a guide pattern on the substrate before forming the self-assembly film.

9. A self-assembly composition for pattern formation, which comprises a block copolymer comprising

a polymerization unit (a) having a structure represented by the following formula (103), and

a polymerization unit (b) having a structure represented by the following formula (105), wherein

the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less based on the total mass of the block copolymer:

wherein, in the formula (103), R 1 each independently represents a hydrogen atom, an alkyl group, an acyl group, an aryl group, or a phosphoryl group, and a plurality of R 1 may be identical to or different from one another; R 5 represents a hydrogen atom or an alkyl group, and a plurality of R 5 may be identical to or different from one another; X 1 and Y 1 each independently represent a single bond or a linking group, a plurality of X 1 may be identical to or different from one another, and a plurality of Y 1 may be identical to or different from one another; p represents an integer of 2 or more and 1500 or less, r represents an integer of 0 or more, and at least one of a plurality of r represents an integer of 1 or more; and the symbol * represents a binding site with any one of R 1 , when r represents 2 or more, or represents a binding site with any one oxygen atom to which R 1 binds, instead of R 1 ; and

in the formula (105), W 1 represents a carbon atom or a silicon atom, and a plurality of W 1 may be identical to or different from one another; W 2 represents —CR 2 —, —O—, —S—, or —SiR 2 — (provided that R represents a hydrogen atom or an alkyl group containing 1 to 5 carbon atoms, and a plurality of R may be identical to or different from one another), and a plurality of W 2 may be identical to or different from one another; R 11 represents a hydrogen atom, a methyl group, or a hydroxyl group, and a plurality of R 11 may be identical to or different from one another; R 12 represents a phenyl group; and q represents an integer of 2 or more and 3000 or less.