IP Library Granted Patent US 11,118,977
Granted Patent B2
US 11,118,977 · App. 16/608,684 · Granted Sep 14, 2021

Terahertz wave detection device and terahertz wave detection system

Inventors: Yukio Kawano (Tokyo, JP); Daichi Suzuki (Tokyo, JP)
Assignee: Tokyo Institute of Technology
G01J5/023G01N21/3581
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Quick Facts
Patent No.
US 11,118,977
App. No.
16/608,684
Granted
Sep 14, 2021
Kind
B2
Abstract

Provided are a terahertz wave detection device and a terahertz wave detection system to execute checking at high speed with high sensitivity and accuracy and to execute omnidirectional inspection without requiring a large checking system. A flexible array sensor ( 30 ) includes: a terahertz wave detection element ( 10 ) having a flexible single-walled carbon nanotube film ( 11 ), and a first electrode ( 12 ) and a second electrode ( 13 ) disposed to face each other on a two-dimensional plane of the single-walled carbon nanotube film ( 11 ); and a flexible substrate ( 20 ) having flexibility to support the terahertz wave detection element ( 10 ) so as to be freely curved. The flexible substrate ( 20 ) is preferably formed in a curved or cylindrical shape, so that the terahertz wave detection elements ( 10 ) are arrayed on the flexible substrate 20 formed in a curved or cylindrical shape.

Claims (60)

1. A terahertz wave detection device comprising:

one or more terahertz wave detection elements, each configured to include:

a carbon nanotube film having flexibility; and

a first electrode and a second electrode that are disposed to face each other on a two-dimensional plane of the carbon nanotube film,

wherein the carbon nanotube film is a carbon nanotube having a ratio of the value of a standard deviation multiplied by 3 divided by a mean diameter and being greater than 0.20 but less than 0.60.

2. The terahertz wave detection device as claimed in claim 1 , further comprising:

a flexible substrate having flexibility that supports the one or more terahertz wave detection elements so as to be freely curved.

3. The terahertz wave detection device as claimed in claim 1 ,

wherein the one or more terahertz wave detection elements are arrayed on the flexible substrate.

4. The terahertz wave detection device as claimed in claim 1 , further comprising:

a flexible substrate formed in a curved or cylindrical shape,

wherein the one or more terahertz wave detection elements are arrayed on the flexible substrate formed in a curved or cylindrical shape.

5. The terahertz wave detection device as claimed in claim 1 , further comprising:

a flexible substrate formed in a cup shape as being convex upward,

wherein the one or more terahertz wave detection elements are arrayed concentrically about a vertex of the flexible substrate in a cup shape.

6. The terahertz wave detection device as claimed in claim 1 , further comprising:

one or more terahertz oscillators that transmit terahertz waves to be received by the one or more terahertz wave detection elements.

7. The terahertz wave detection device as claimed in claim 1 , wherein

the carbon nanotube film contains 50% by weight or more of the single-walled carbon nanotubes.

8. A terahertz wave detection device comprising:

one or more terahertz wave detection element, each configured to include:

a carbon nanotube film having flexibility;

a first electrode and a second electrode that are disposed to face each other on a two-dimensional plane of the carbon nanotube film; and

one or more terahertz oscillators that transmit terahertz waves to be received by the one or more terahertz wave detection elements,

wherein the one or more terahertz wave detection elements receive terahertz waves diffusely reflected by a checked object, and

wherein the carbon nanotube film is a carbon nanotube having a ratio of the value of a standard deviation multiplied by 3 divided by a mean diameter and being greater than 0.20 but less than 0.60.

9. A terahertz wave detection device comprising:

one or more terahertz wave detection elements, each configured to include:

a carbon nanotube film having flexibility;

a first electrode and a second electrode that are disposed to face each other on a two-dimensional plane of the carbon nanotube film; and

one or more terahertz oscillators that transmit terahertz waves to be received by the one or more terahertz wave detection elements,

wherein the one or more terahertz oscillators are arranged on the carbon nanotube film along with the one or more terahertz wave detection elements, and

wherein the carbon nanotube film is a carbon nanotube having a ratio of the value of a standard deviation multiplied by 3 divided by a mean diameter and being greater than 0.20 but less than 0.60.

10. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 1 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

11. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 2 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

12. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 3 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

13. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 4 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

14. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 5 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

15. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 6 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

16. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 7 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

17. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 8 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

18. A terahertz wave detection system comprising:

a terahertz wave detection device as claimed in claim 9 ; and

a data collection device to collect physical data detected by the terahertz wave detection device.

Assignments (4)
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY CITY PREVIOUSLY RECORDED AT REEL: 058013 FRAME: 0798. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT . Recorded Nov 17, 2021
From: TOKYO INSTITUTE OF TECHNOLOGY
To: CHUO UNIVERSITY
Reel/Frame 058175/0447 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 057721 FRAME: 0216. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT . Recorded Nov 3, 2021
From: TOKYO INSTITUTE OF TECHNOLOGY
To: CHUO UNIVERSITY
Reel/Frame 058013/0798 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 6, 2021
From: TOKYO INSTITUTE OF TECHNOLOGY
To: CHOU UNIVERSITY
Reel/Frame 057721/0216 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 28, 2019
From: KAWANO, YUKIO; SUZUKI, DAICHI
To: TOKYO INSTITUTE OF TECHNOLOGY
Reel/Frame 050837/0974 →
Priority Claims (1)
JP JP2017-093256 · May 9, 2017 · national
Continuity (1)
Related Publication 20200141806A1 · May 7, 2020