Semiconductor device
A semiconductor device has a semiconductor substrate that includes an element range and a peripheral range. The semiconductor substrate includes: a body region disposed within the element range; a p-type deep region that is disposed from the element range through the peripheral range, is distributed from an upper surface of the semiconductor substrate to a position deeper than a lower end of each gate trench, and involves end gate trench; and a p-type voltage resistance region that is disposed within the peripheral range, and is distributed from the upper surface to a position shallower than a lower end of the p-type deep region. A p-type impurity concentration within the p-type deep region is increased in the direction from the body region toward the p-type voltage resistance region.
1. A semiconductor device comprising:
a semiconductor substrate including an element range where multiple gate trenches are provided on an upper surface of the semiconductor substrate, and a peripheral range provided outside of the element range;
an upper electrode provided on the upper surface of the semiconductor substrate;
a lower electrode provided on a lower surface of the semiconductor substrate; and
gate electrodes each of which is disposed within each gate trench, and each of which is electrically insulated from the semiconductor substrate by a gate insulating film, wherein
the semiconductor substrate includes:
an n-type emitter region that is disposed within the element range, is connected to the upper electrode, and is in contact with the gate insulating films;
a p-type body region that is disposed within the element range, and is in contact with the gate insulating films under the n-type emitter region;
a p-type deep region that is disposed from the element range through the peripheral range, is distributed from the upper surface to a position deeper than a lower end of each gate trench, and involves end gate trench located closest to the peripheral range among the multiple gate trenches;
a p-type voltage resistance region that is disposed within the peripheral range, and is distributed from the upper surface to a position shallower than a lower end of the p-type deep region;
an n-type drift region that is disposed from the element range through the peripheral range, is in contact with the gate insulating films under the p-type body region, is separated from the n-type emitter region by the p-type body region, is in contact with the p-type deep region from below, and is in contact with the p-type voltage resistance region from below;
a p-type collector region that is disposed under the n-type drift region, and is in contact with the lower electrode; and
an n-type cathode region that is disposed under the n-type drift region, and is in contact with the lower electrode,
and
a p-type impurity concentration within the p-type deep region is increased in a direction from the p-type body region toward the p-type voltage resistance region.
2. The semiconductor device according to claim 1 , wherein
the p-type deep region includes: a high concentration region disposed within a range including the upper surface and a low concentration region that is disposed under the high concentration region, and has a p-type impurity concentration lower than a p-type impurity concentration in the high concentration region, and
the p-type impurity concentration within the low concentration region is increased in the direction from the p-type body region toward the p-type voltage resistance region.
3. The semiconductor device according to claim 2 , wherein
a maximum value of the p-type impurity concentration within the low concentration region is higher than a maximum value of a p-type impurity concentration within the p-type voltage resistance region.
4. The semiconductor device according to claim 1 , wherein the p-type voltage resistance region is a resurf region adjacent to the p-type deep region.
5. The semiconductor device according to claim 1 , wherein the p-type voltage resistance region is an annular guard ring that is separated from the p-type deep region by the n-type drift region, and surrounds a periphery of the element range.
6. The semiconductor device according to claim 1 , wherein the p-type impurity concentration within the p-type deep region is continuously increased in the direction from the p-type body region toward the p-type voltage resistance region.
7. The semiconductor device according to claim 1 , wherein the p-type impurity concentration within the p-type deep region is increased in a stepwise manner in the direction from the p-type body region toward the p-type voltage resistance region.
8. The semiconductor device according to claim I. wherein the p-type deep region is asymmetrical.
9. The semiconductor device according to claim wherein the p-type deep region increases in size in a direction from the p-type body region toward the p-type voltage resistance region.