Force sensor with MEMS-based device and force touching member
A force sensor includes a package substrate, a MEMS-based device, a package body and a force touching member. The MEMS-based device is disposed on the package substrate and electrically connected with the package substrate. The package body encapsulates the MEMS-based device. The force touching member including a rod is disposed on the package body and corresponding to the MEMS-based device. The force sensor allows a greater assembly tolerance.
1. A force sensor with a force touching member, comprising:
a package substrate;
a microelectromechanical system (MEMS)-based device disposed on the package substrate and electrically connected with the package substrate, wherein the MEMS-based device includes a MEMS element providing a deformable area; and
a package body encapsulating the MEMS-based device,
wherein the force touching member includes a rod for pressing disposed on the package body and the rod corresponds to a geometric center of the deformable area of the MEMS element of the MEMS-based device, and
wherein the package body is filled between the rod and the deformable area.
2. The force sensor with a force touching member according to claim 1 , wherein a top surface of the rod is a planar surface or a curved surface.
3. The force sensor with a force touching member according to claim 1 , wherein the rod is made of a metallic material or a polymeric material.
4. The force sensor with a force touching member according to claim 1 , wherein the rod has a plate interposed between the rod and the package body or disposed on the rod.
5. The force sensor with a force touching member according to claim 4 , wherein a projection area of the plate is equal to or smaller than the MEMS-based device.
6. The force sensor with a force touching member according to claim 4 , wherein the plate is interposed between the rod and the package body and covers the package body.
7. The force sensor with a force touching member according to claim 4 , wherein the plate is disposed on the rod and has a connection leg, which is connected to the package body.
8. The force sensor with a force touching member according to claim 1 , wherein the force touching member is an extension of the package body.