IP Library › Granted Patent US 11,139,232
Granted Patent B2
US 11,139,232 · App. 16/812,235 · Granted Oct 5, 2021

Wiring structure and method for manufacturing the same

Inventor: Wen Hung Huang (Kaohsiung, TW)
Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
H01L23/49838H01L21/4857H01L23/49822H01L24/16H01L2224/16227
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Quick Facts
Patent No.
US 11,139,232
App. No.
16/812,235
Granted
Oct 5, 2021
Kind
B2
Abstract

A wiring structure and a method for manufacturing a wiring structure are provided. The wiring structure includes a first conductive structure, a second conductive structure, a dent structure and an adhesion layer. The first conductive structure includes at least one dielectric layer and at least one circuit layer in contact with the dielectric layer. The second conductive structure includes at least one dielectric layer and at least one circuit layer in contact with the dielectric layer. The dent structure is attached to the first conductive structure. The adhesion layer is interposed between the first conductive structure and the second conductive structure to bond the first conductive structure and the second conductive structure together. A periphery portion of the adhesion layer is disposed in a gap between the dent structure and the second conductive structure.

Claims (34)

1. A wiring structure, comprising:

a first conductive structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer;

a second conductive structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer;

a dent structure attached to the first conductive structure; and

an adhesion layer interposed between the first conductive structure and the second conductive structure to bond the first conductive structure and the second conductive structure together, wherein a periphery portion of the adhesion layer is disposed in a gap between the dent structure and the second conductive structure.

2. The wiring structure of claim 1 , wherein a line space of the circuit layer of the first conductive structure is greater than a line space of the circuit layer of the second conductive structure.

3. The wiring structure of claim 1 , wherein a line space of the circuit layer of the second conductive structure is greater than a line space of the circuit layer of the first conductive structure.

4. The wiring structure of claim 1 , wherein the dent structure is an enclosed loop from a top view.

5. The wiring structure of claim 1 , wherein a thickness of the dent structure is less than a gap between the first conductive structure and the second conductive structure.

6. The wiring structure of claim 1 , wherein a topmost circuit layer of the first conductive structure protrudes from a top surface of the first conductive structure, and a thickness of the dent structure is greater than or equal to a thickness of the topmost circuit layer of the first conductive structure.

7. The wiring structure of claim 6 , wherein the dent structure contacts the top surface of the first conductive structure directly.

8. The wiring structure of claim 1 , further comprising at least one conductive via extending through at least a portion of the second conductive structure and the adhesion layer, and electrically connected to the circuit layer of the first conductive structure.

9. The wiring structure of claim 1 , further comprising at least one conductive via extending through at least a portion of the first conductive structure and the adhesion layer, and electrically connected to the circuit layer of the second conductive structure.

10. The wiring structure of claim 1 , wherein a material of the dent structure is different from a material of the dielectric layer of the first conductive structure.

11. The wiring structure of claim 1 , wherein the dent structure defines a central cavity, and the second conductive structure is attached to a central portion of the adhesion layer in the central cavity of the dent structure.

12. The wiring structure of claim 1 , wherein a width of the second conductive structure is less than a width of the first conductive structure.

13. A wiring structure, comprising:

a first stacked structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer;

a second stacked structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer, wherein a width of the second stacked structure is less than a width of the first stacked structure;

a dent structure attached to the first stacked structure, and defining a central cavity; and

an adhesion layer disposed in the central cavity, and the second conductive structure is attached to the adhesion layer in the central cavity of the dent structure.

14. The wiring structure of claim 13 , wherein a line space of the circuit layer of the first stacked structure is greater than a line space of the circuit layer of the second stacked structure.

15. The wiring structure of claim 13 , wherein a periphery portion of the adhesion layer is disposed in a gap between the dent structure and the second stacked structure.

16. The wiring structure of claim 13 , wherein the first stacked structure further includes a core portion, and the at least one dielectric layer and the at least one circuit layer of the first stacked structure are disposed adjacent to a surface of the core portion.

17. The wiring structure of claim 13 , further comprising at least one conductive via extending through the first stacked structure, the second stacked structure or the wiring structure, and electrically connecting the first stacked structure and the second stacked structure.

18. A method for manufacturing a wiring structure, comprising:

(a) providing a first conductive structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer;

(b) forming a dent structure on the first conductive structure to define a central cavity;

(c) disposing an adhesion layer in the central cavity;

(d) providing a second conductive structure including at least one dielectric layer and at least one circuit layer in contact with the dielectric layer; and

(e) attaching the second conductive structure to the first conductive structure through the adhesion layer.

19. The method of claim 18 , wherein after (e), the method further comprises:

(f) electrically connecting the first conductive structure and the second conductive structure.

20. The method of claim 19 , wherein (f) is forming at least one conductive via extending through the first conductive structure and/or the second conductive structure, wherein the first conductive structure is electrically connected to the second conductive structure through the conductive via.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2020
From: HUANG, WEN HUNG
To: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
Reel/Frame 052046/0108 →
Continuity (1)
Related Publication 20210280505A1 · Sep 9, 2021