Multi-stack three-dimensional memory devices
Embodiments of three-dimensional (3D) memory devices having multiple memory stacks and methods for forming the 3D memory devices are disclosed. In an example, a 3D memory device includes a first device chip, a second device chip, and a bonding interface. The first device chip includes a peripheral device and a first interconnect layer. The second device chip includes a substrate, two memory stacks disposed on opposite sides of the substrate, two memory strings each extending vertically through one of the two memory stacks, and a second interconnect layer. The bonding interface is formed vertically between the first interconnect layer of the first device chip and the second interconnect layer of the second device chip.
1. A method for forming a three-dimensional (3D) memory device, comprising:
forming a peripheral device on a first chip substrate;
forming a first interconnect layer above the peripheral device on the first chip substrate;
forming a memory stack comprising two memory decks formed one over another on a second chip substrate, wherein each memory decks has a memory string extending vertically through it;
forming a second interconnect layer above the memory stack; and
bonding the first chip substrate and the second chip substrate at a bonding interface between the first interconnect layer and the second interconnect layer,
wherein the bonding includes hybrid bonding.
2. The method of claim 1 , further comprising forming a common source layer vertically between the two memory decks.
3. The method of claim 2 , wherein the common source layer comprises two conductive layers.
4. The method of claim 1 , further comprising forming an inter-deck plug vertically between the two memory decks.
5. The method of claim 4 , wherein the inter-deck plug comprises a semiconductor plug.
6. The method of claim 1 , further comprising forming another memory stack and another memory string extending vertically through the another memory stack beside, below, or above the peripheral device on the first chip substrate.
7. The method of claim 6 , further comprising:
forming a first contact extending vertically through the another memory stack; and
forming a second contact extending vertically through the two memory decks,
wherein the first contact is electrically connected to the second contact after the bonding through the first interconnect layer and the second interconnect layer.
8. A three-dimensional (3D) memory device, comprising:
a first device chip, comprising:
a first interconnect layer;
a peripheral device; and
a first memory stack;
a second device chip, comprising:
a second memory stack comprising two memory decks disposed one over another;
two memory strings each extending vertically through one of the two memory decks; and
a second interconnect layer; and
a bonding interface formed vertically between the first interconnect layer of the first device chip and the second interconnect layer of the second device chip.
9. The 3D memory device of claim 8 , wherein the first device chip further comprises another memory string extending vertically through the first memory stack.
10. The 3D memory device of claim 9 , wherein the first memory stack of the first device chip is disposed beside, below, or above the peripheral device.
11. The 3D memory device of claim 8 , wherein the first interconnect layer comprises a plurality of bonding contacts and bonding dielectrics at the bonding interface.
12. The 3D memory device of claim 8 , wherein the second device chip further comprises a common source layer disposed vertically between the two memory decks and electrically connected to the two memory strings of the second device chip.
13. The 3D memory device of claim 12 , wherein the common source layer comprises two conductive layers.
14. The 3D memory device of claim 8 , wherein the second device chip further comprises an inter-deck plug disposed vertically between the two memory decks and electrically connected to the two memory strings of the second device chip.
15. The 3D memory device of claim 14 , wherein the inter-deck plug comprises a semiconductor plug.
16. The 3D memory device of claim 8 , wherein the second interconnect layer comprises a plurality of bonding contacts and bonding dielectrics at the bonding interface.
17. The 3D memory device of claim 9 , wherein the first device chip further comprises a first contact extending vertically through the first memory stack of the first device chip.
18. The 3D memory device of claim 17 , wherein the second device chip further comprises a second contact extending vertically through the two memory decks of the second device chip.
19. The 3D memory device of claim 18 , wherein each of the first and second interconnect layers comprises a contact electrically connecting the first contact of the first device chip and the second contact of the second device chip.
20. A three-dimensional (3D) memory device, comprising:
a first device chip, comprising:
a first interconnect layer;
a first memory stack; and
a contact extending vertically through the first memory stack of the first device chip;
a second device chip, comprising:
a second memory stack comprising two memory decks disposed one over another;
two memory strings each extending vertically through one of the two memory decks; and
a second interconnect layer; and
a bonding interface formed vertically between the first interconnect layer of the first device chip and the second interconnect layer of the second device chip.