Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used
Provided is a flow rate adjustment valve of a motor-operated valve type, which overcomes the problems that flow rate adjustment valves of a manual valve type have, while making full use of compactness the manual valves have. The flow rate adjustment valve includes a rotation device that rotates a rotation member to cause a vertically movable body to move vertically. The rotation device includes: a driven gear disposed at an upper end portion of the rotation member; and a motor that rotates a driving gear engaged with the driven gear. The motor, which is a stepping servo motor, is disposed below the driving gear and has a rotary shaft extending upward. The driving gear is fixed to an upper end portion of the rotary shaft.
1. A flow rate adjustment valve including: a body provided with a fluid passage; a valve element configured to open and close the fluid passage; a vertically movable body that moves upward or downward whereby an opening degree of the fluid passage is adjusted, the opening degree of the fluid passage being defined by the valve element; a rotation member that is screwed on the vertically movable body; and a rotation device configured to rotate the rotation member thereby causing the vertically movable body to move upward or downward, wherein
the rotation device comprises a driven gear disposed at a part of the rotation member, a driving gear engaged with the driven gear, and a motor configured to rotate the driving gear, and
the motor is a stepping servo motor and has a rotary shaft to which the driving gear is fixed,
wherein the driving gear and the driven gear each have an axis extending vertically and a vertical dimension of the driving gear is greater than that of the driven gear, with these dimensions, even in the case where the driven gear moves vertically, the driving gear and the driven gear do not move out of engagement.
2. The flow rate adjustment valve according to claim 1 , wherein the motor is disposed so as to be adjacent to the rotation member, the rotary shaft of the motor extends upward, and the driving gear is fixed to an upper end portion of the rotary shaft.
3. A fluid control apparatus comprising a plurality of lines each having a flow rate adjustment valve in which an opening degree is set at a predetermined value, wherein each of the flow rate adjustment valves of the plurality of the lines is the flow rate adjustment valve according to claim 2 , and an amount of motion of the motor of each flow rate adjustment valve is monitored by a monitoring device connected.
4. A fluid control apparatus comprising a plurality of lines each having a flow rate adjustment valve in which an opening degree is set at a predetermined value, wherein each of the flow rate adjustment valves of the plurality of the lines is the flow rate adjustment valve according to claim 1 , and an amount of motion of the motor of each flow rate adjustment valve is monitored by a monitoring device connected.
5. A flow rate adjustment valve including: a body provided with a fluid passage; a valve element configured to open and close the fluid passage; a vertically movable body that moves upward or downward whereby an opening degree of the fluid passage is adjusted, the opening degree of the fluid passage being defined by the valve element; a rotation member that is screwed on the vertically movable body; and a rotation device configured to rotate the rotation member thereby causing the vertically movable body to move upward or downward, wherein
the rotation device comprises a driven gear disposed at a part of the rotation member, a driving gear engaged with the driven gear, and a motor configured to rotate the driving gear, and
the motor is a stepping servo motor and has a rotary shaft to which the driving gear is fixed,
wherein the motor has four functions of: position control of controlling a position with a closed loop by signals from an encoder; speed control of controlling a rotational speed of the rotation member; pressing-against control of moving the rotation member in a 0% opening-degree direction at continuous rated torque or lower until a torque value reaches a predetermined value or greater; and torque control of controlling torque, and
detection of a 0% opening-degree position is performed by the function of the pressing-against control, a setting of a predetermined opening degree is performed by the function of the position control and the function of the speed control, and when the detection of the 0% opening-degree position and the setting of the predetermined opening degree are performed, a torque abnormality is determined by the function of the torque control.
6. The flow rate adjustment valve according to claim 5 , wherein the motor is disposed so as to be adjacent to the rotation member, the rotary shaft of the motor extends upward, and the driving gear is fixed to an upper end portion of the rotary shaft.
7. A fluid control apparatus comprising a plurality of lines each having a flow rate adjustment valve in which an opening degree is set at a predetermined value, wherein each of the flow rate adjustment valves of the plurality of the lines is the flow rate adjustment valve according to claim 5 , and an amount of motion of the motor of each flow rate adjustment valve is monitored by a monitoring device connected.