Semiconductor integrated circuit device including capacitive element using vertical nanowire field effect transistors
A capacitive element using VNW FETs is provided. First and second components each constituting a transistor are arranged in an X direction. From the first component, a first gate interconnect extends away from the second component, and a first top interconnect and a first bottom interconnect extend toward the second component. From the second component, a second gate interconnect extends toward the first component, and a second top interconnect and a second bottom interconnect extend away from the first component. The first top interconnect, the first bottom interconnect, and the second gate interconnect are connected.
1. A semiconductor integrated circuit device comprising a capacitive element,
wherein
the capacitive element includes a first transistor and a second transistor,
the first transistor has a first component including one vertical nanowire (VNW) FET or a plurality of VNW FETs arranged in a first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the second transistor has a second component including one VNW FET or a plurality of VNW FETs arranged in the first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the first component and the second component are placed side by side in the first direction,
the first component includes
a first gate interconnect connected with the gate of the VNW FET, extending from the VNW FET away from the second component in the first direction,
a first top interconnect connected with the top of the VNW FET, extending from the VNW FET toward the second component in the first direction, and
a first bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET toward the second component in the first direction,
the second component includes
a second gate interconnect connected with the gate of the VNW FET, extending from the VNW FET toward the first component in the first direction,
a second top interconnect connected with the top of the VNW FET, extending from the VNW FET away from the first component in the first direction, and
a second bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET away from the first component in the first direction, and
the first top interconnect, the first bottom interconnect, and the second gate interconnect are connected.
2. The semiconductor integrated circuit device of claim 1 , wherein
the first top interconnect is connected with a metal interconnect extending in a second direction perpendicular to the first direction.
3. A semiconductor integrated circuit device comprising a capacitive element,
wherein
the capacitive element includes a first transistor and a second transistor,
the first transistor has a first component including one vertical nanowire (VNW) FET or a plurality of VNW FETs arranged in a first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the second transistor has a second component including one VNW FET or a plurality of VNW FETs arranged in the first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the first component and the second component are placed side by side in the first direction,
the first component includes
a first gate interconnect connected with the gate of the VNW FET, extending from the VNW FET away from the second component in the first direction,
a first top interconnect connected with the top of the VNW FET, extending from the VNW FET toward the second component in the first direction, and
a first bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET toward the second component in the first direction,
the second component includes
a second gate interconnect connected with the gate of the VNW FET, extending from the VNW FET away from the first component in the first direction,
a second top interconnect connected with the top of the VNW FET, extending from the VNW FET toward the first component in the first direction, and
a second bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET toward the first component in the first direction, and
the first top interconnect and the second top interconnect are connected, and the first bottom interconnect and the second bottom interconnect are connected.
4. The semiconductor integrated circuit device of claim 3 , wherein
the first and second top interconnects are connected with the first and second bottom interconnects.
5. The semiconductor integrated circuit device of claim 3 , wherein
the first and second top interconnects are formed as a single interconnect.
6. The semiconductor integrated circuit device of claim 3 , wherein
the first and second top interconnects are connected with a metal interconnect extending in a second direction perpendicular to the first direction.
7. The semiconductor integrated circuit device of claim 3 , wherein
the first and second bottom interconnects are formed as a single bottom region.
8. A semiconductor integrated circuit device comprising a capacitive element,
wherein
the capacitive element includes a first transistor and a second transistor,
the first transistor has a first component including one vertical nanowire (VNW) FET or a plurality of VNW FETs arranged in a first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the second transistor has a second component including one VNW FET or a plurality of VNW FETs arranged in the first direction with gates, tops, and bottoms of the VNW FETs being independently connected with each other,
the first component and the second component are placed side by side in the first direction,
the first component includes
a first gate interconnect connected with the gate of the VNW FET, extending from the VNW FET toward the second component in the first direction,
a first top interconnect connected with the top of the VNW FET, extending from the VNW FET away from the second component in the first direction, and
a first bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET away from the second component in the first direction,
the second component includes
a second gate interconnect connected with the gate of the VNW FET, extending from the VNW FET toward the first component in the first direction,
a second top interconnect connected with the top of the VNW FET, extending from the VNW FET away from the first component in the first direction, and
a second bottom interconnect connected with the bottom of the VNW FET, extending from the VNW FET away from the first component in the first direction, and
the first gate interconnect and the second gate interconnect are connected.
9. The semiconductor integrated circuit device of claim 8 , wherein
the first and second gate interconnects are formed as a single interconnect.
10. The semiconductor integrated circuit device of claim 8 , wherein
the first and second gate interconnects are connected with a metal interconnect extending in a second direction perpendicular to the first direction.