Open Czochralski furnace for single crystal growth
View Patent ↗The present disclosure provides an open Czochralski furnace for single crystal growth. The crystal growth apparatus may include a furnace chamber which includes a furnace body and a furnace cover. The furnace cover may be mounted on a top of the furnace body. The furnace cover may include a first through hole. The first through hole may be configured to place a temperature field. The crystal growth apparatus in the present disclosure can solve a problem that a traditional vacuum furnace needs to firstly pump a high vacuum and secondly recharge a protecting gas, thereby improving the apparatus safety; simplify the structure of the furnace body such that components that need maintenance and repair can be disassembled quickly, thereby reducing manufacturing and maintenance costs; improve the operation accuracy and stability of the apparatus; and reduce the influence of heat convection on the stability of weighing signals in the open furnace.
1. An apparatus for crystal growth, comprising:
a furnace chamber including a furnace body and a furnace cover, wherein
the furnace chamber is a non-closed structure,
the furnace cover is mounted on a top of the furnace body,
the furnace cover includes a first through hole, and
the first through hole is configured to place a temperature field device; and
the temperature field device, wherein the temperature field device is sealed.
2. The apparatus of claim 1 , wherein after the temperature field device is placed in the first through hole of the furnace cover, there is no sealing between the furnace cover and an outer wall of the temperature field device.
3. The apparatus of claim 1 , wherein a cooling structure is mounted on a sidewall of the furnace body and the furnace cover.
4. The apparatus of claim 1 , wherein
the temperature field device includes a sealing drum, a cover plate mounted on a top of the sealing drum, and a bottom plate mounted on a bottom of the sealing drum, the cover plate including a second through hole; and
the apparatus further comprises:
a furnace frame, the furnace chamber being mounted on the furnace frame;
a pulling rod component that passes through the second through hole and extends into the temperature field device; and
a heater mounted between the furnace chamber and the temperature field device.
5. The apparatus of claim 4 , wherein the apparatus further comprises:
a pulling component configured to drive the pulling rod component to move up and down; and
a rotating component configured to drive the pulling rod component to rotate.
6. The apparatus of claim 5 , wherein the pulling component includes a pillar, a slide, a screw rod, and a first driving device, wherein:
the first driving device is mounted on a top of the pillar;
a slide rail is mounted on the pillar;
the screw rod is mounted in parallel with the slide rail, and one end of the screw rod is connected to the first driving device;
the slide is nested on the screw rod and fit with the screw rod by threads, at least a part of the slide is located within a slide chute, and a rotation of the screw rod drives the slide to move up and down along the slide chute; and
the rotating component is mounted on the slide.
7. The apparatus of claim 6 , wherein the apparatus further comprises:
a weighing component configured to determine a weight of a crystal on the pulling rod component, the weighing component being mounted on the slide.
8. The apparatus of claim 7 , wherein the rotating component at least includes a second driving device and a transmission component, wherein
the second driving device drives the weighing component to rotate through the transmission component.
9. The apparatus of claim 8 , wherein the weighing component includes a weighing chamber and a weighing sensor, wherein:
the weighing sensor is mounted inside the weighing chamber;
one end of the weighing sensor is fixedly connected to the pulling rod component; and
the other end of the weighing sensor is fixedly connected to a cover plate of the weighing chamber.
10. The apparatus of claim 9 , wherein:
the transmission component includes a belt pulley and a belt;
an output spin axis of the second driving device is connected to a spin axis of the belt pulley; and
at least one belt pulley is mounted on the belt and the weighing chamber.
11. The apparatus of claim 10 , wherein the pulling rod component at least includes a middle rod and a guide rod, wherein:
one end of the middle rod is fixedly connected to the weighing chamber;
the middle rod passes through a third through hole mounted on the slide;
the middle rod includes a hollow structure;
the guide rod passes through the middle rod; and
one end of the guide rod is connected to the weighing sensor and the other end of the guide rod is configured to connect a seed rod.
12. The apparatus of claim 1 , wherein the temperature field device includes a bottom plate, a cover plate, a drum, and a filler.
13. The apparatus of claim 1 , wherein the temperature field device includes a bottom plate, a first cover plate, a second cover plate, a first drum, a second drum, and a filler.
14. The apparatus of claim 13 , wherein
the filler includes a granule shaped material, a brick shaped material, and/or a felt shaped material; and
the filler is made of a heat resistant material.
15. The apparatus of claim 14 , wherein the filler includes at least one of a zircon sand, a zirconia particle, an alumina particle, a zirconia felt, a zirconia brick, or an alumina brick.
16. The apparatus of claim 13 , wherein the first drum includes a quartz tube, a corundum tube; or
the first drum is made of a heat resistant material.