Susceptor for a chemical vapour deposition reactor
A susceptor for a CVD-reactor includes insertion openings arranged in a bearing surface of the susceptor. An insertion section of a positioning element is inserted into one of the insertion openings. The insertion section forms positioning flanks with a section projecting from the insertion opening for fixing the position of a substrate. The insertion openings each have side walls and a base. The insertion section comprises bearing areas adjacent to the side walls of the insertion openings and a lower side of the positioning element facing the base of the insertion opening. The base of the insertion opening is separated from the lower side of the positioning element by a first distance. An edge protruding section of the positioning element is separated from a section of the bearing surface of the susceptor by a second distance.
1. A susceptor ( 1 ) for a chemical vapor deposition (CVD) reactor with insertion openings ( 3 ), which are arranged in a bearing surface ( 2 ) of the susceptor ( 1 ) and into each an insertion section ( 13 ) of a positioning element ( 12 ) is inserted, wherein a circular storage space is formed between the plurality of positioning elements ( 12 ),
wherein each of the positioning elements ( 12 ) forms positioning flanks ( 15 ) with a positioning section ( 14 ) that protrudes from a corresponding one of the insertion openings ( 3 ) in order to fix a position of a substrate ( 11 ) within the circular storage space,
wherein a first one of the insertion openings ( 3 ) has sidewalls ( 5 ) and a base ( 4 ),
wherein a first one of the insertion sections ( 13 ) comprises contact zones ( 17 ′), which abut on the sidewalls ( 5 ) of the first insertion opening ( 3 ),
wherein a first one of the positioning sections ( 14 ) comprises an underside ( 16 ) that faces the base ( 4 ) of the first insertion opening ( 3 ), and
wherein a hollow space ( 28 ) is formed between the base ( 4 ) of the first insertion opening ( 3 ) and the underside ( 16 ) of the first positioning section ( 14 ).
2. A susceptor ( 1 ) for a chemical vapor deposition (CVD) reactor with insertion openings ( 3 ), which are arranged in a bearing surface ( 2 ) of the susceptor ( 1 ) and into each an insertion section ( 13 ) of a positioning element ( 12 ) is inserted, wherein a circular storage space is formed between the plurality of positioning elements ( 12 ),
wherein each of said positioning elements ( 12 ) forms positioning flanks ( 15 ) with a positioning section ( 14 ) that protrudes from a corresponding one of the insertion openings ( 3 ) in order to fix a position of a substrate ( 11 ) within the circular storage space,
wherein a first one of the insertion openings ( 3 ) has sidewalls ( 5 ) and a base ( 4 ),
wherein a first one of the insertion sections ( 13 ) comprises contact zones ( 17 ′), which abut on the sidewalls ( 5 ) of the first insertion opening ( 3 ),
wherein a first one of the positioning sections ( 14 ) comprises an underside ( 16 ) that faces the base ( 4 ) of the first insertion opening ( 3 ),
wherein an edge-protruding section ( 18 ) of the first positioning section ( 14 ) protruding from the first insertion opening ( 3 ) forms at least one of the positioning flanks ( 15 ) and protrudes over a section ( 9 , 6 ′) of the bearing surface ( 2 ) bordering on an edge of the first insertion opening ( 3 ), and
wherein the edge-protruding section ( 18 ) protrudes over the section ( 9 , 6 ′) of the bearing surface ( 2 ) with a clearance (b) greater than zero such that a free space is formed.
3. The susceptor ( 1 ) of claim 1 , wherein at least one section of the first positioning section ( 14 ) is supported on a carrying section of the base ( 4 ) of the first insertion opening ( 3 ) and at least a section of the base ( 4 ) has a clearance (a) greater than zero from a section of the underside ( 16 ) other than the at least one supporting section.
4. The susceptor ( 1 ) of claim 3 , wherein the at least one section is formed by the underside ( 16 ) of the first positioning section ( 14 ) and the carrying section is formed by a projection ( 24 ) or a step ( 22 ) of the base ( 4 ) of the first insertion opening ( 3 ), wherein the underside ( 16 ) of the first positioning section ( 14 ) is planar.
5. The susceptor of claim 1 , further comprising a body ( 20 ) that is arranged in the hollow space ( 28 ) between the base ( 4 ) of the inserting opening ( 3 ) and the underside ( 16 ) of the positioning section ( 14 ) and consists of a material with different thermal conductivity than the positioning element ( 12 ) or the susceptor ( 1 ).
6. The susceptor of claim 1 , wherein the hollow space ( 28 ) is arranged between one or more inner walls ( 17 ″) of webs ( 17 ) of the first positioning element ( 12 ) forming the contact zones ( 17 ′).
7. The susceptor ( 1 ) of claim 1 , wherein the first insertion opening ( 3 ) has a polygonal outline, and wherein corners of the polygonal outline are rounded.
8. The susceptor ( 1 ) of claim 1 , further comprising one or more gaps ( 21 ), which are arranged between webs ( 17 ) of the first positioning section ( 14 ) or one or more carrying sections of the base ( 4 ) of the first insertion opening ( 3 ).
9. The susceptor ( 1 ) of claim 6 , wherein the webs ( 17 ) of the first positioning element ( 12 ) are supported on the base ( 4 ) of the first insertion opening ( 3 ).
10. The susceptor ( 1 ) of claim 1 , wherein the first positioning element ( 12 ) is supported on a step ( 22 ) or a projection ( 24 ) of the first insertion opening ( 3 ).
11. The susceptor ( 1 ) of claim 1 , wherein the base ( 4 ) of the first insertion opening ( 3 ) has a planar base surface or a curved base surface.
12. The susceptor ( 1 ) of claim 1 , wherein the underside ( 16 ) of the first positioning section ( 14 ) is a planar underside surface or a curved underside surface.
13. The susceptor of claim 1 , further comprising projections ( 23 ) that protrude from the underside ( 16 ) of the positioning section ( 14 ), wherein the positioning element ( 12 ) is supported on the base ( 4 ) of the insertion opening ( 3 ) by means of said projections.
14. The susceptor ( 1 ) of claim 6 , further comprising a pedestal ( 25 ) that protrudes from the underside ( 16 ) of the first positioning section ( 14 ) in a region between the webs ( 17 ) of the first positioning element ( 12 ).
15. The susceptor ( 1 ) of claim 1 , wherein an outline of the first insertion opening ( 3 ) is completely covered by an edge-protruding section ( 18 ) of the first positioning element ( 12 ).
16. A susceptor ( 1 ) for a chemical vapor deposition (CVD) reactor with an insertion opening ( 3 ), which is arranged in a bearing surface ( 2 ) of the susceptor ( 1 ) and into which an insertion section ( 13 ) of a positioning element ( 12 ) is inserted,
wherein said positioning element ( 12 ) forms positioning flanks ( 15 ) with a positioning section ( 14 ) that protrudes from the insertion opening ( 3 ),
wherein a storage space for a first substrate ( 11 ) extends between multiple positioning elements ( 12 ),
wherein the first substrate ( 11 ) and a second substrate ( 11 ) abut on the positioning flanks ( 15 ) of the positioning element ( 12 ),
wherein the first substrate ( 11 ) is suspended above a first base ( 10 ) of the storage space extending between the positioning elements ( 12 ),
wherein the insertion opening ( 3 ) has sidewalls ( 5 ) and a second base ( 4 ),
wherein the insertion section ( 13 ) comprises contact zones ( 17 ′), which abut on the sidewalls ( 5 ) of the insertion opening ( 3 ),
wherein the positioning section ( 14 ) comprises an underside ( 16 ) that faces the base ( 4 ) of the insertion opening ( 3 ), and
wherein edge undergrip sections ( 26 ) of the insertion section ( 13 ) protruding into the insertion opening ( 3 ) form carrying zones ( 27 ) for carrying an edge of the first substrate ( 11 ).
17. The susceptor of claim 16 , wherein the carrying zones ( 27 ) comprise bearing projections ( 8 ), on which the edge of the first substrate ( 11 ) lies.
18. The susceptor ( 1 ) of claim 1 , wherein the sidewalls ( 5 ) of the first insertion opening ( 3 ) extend in a curvilinear or rectilinear manner in a plane of the bearing surface ( 2 ) and abut curvilinear or rectilinear contact zones ( 17 ′) of the first insertion section ( 13 ).