Forming wearable stacked strain gauge sensor for monitoring
In one aspect, forming a stacked strain gauge sensor with increased electrical resistance includes: forming multiple sensor layers, wherein the sensor layers include strain gauge sensor wires on substrates; forming holes in the substrates; stacking the sensor layers, one on top of another, to form a stack with the holes aligned in one or more locations forming through holes in the stack; and forming interconnects in the holes in one or more other locations interconnecting the strain gauges sensor wires between adjacent sensor layers to form a stacked strain gauge sensor. A stacked strain gauge sensor and method of use thereof are also provided.
1. A method, comprising:
forming multiple sensor layers by depositing strain gauge sensor wires on substrates;
forming holes in the substrates;
stacking the formed multiple sensor layers, one on top of another, to form a stack with the formed holes aligned in one or more locations forming through holes in the stack; and
forming interconnects in the holes in one or more other locations interconnecting the strain gauge sensor wires between adjacent sensor layers to form a stacked strain gauge sensor.
2. The method of claim 1 , wherein the strain gauge sensor wires have a serpentine configuration.
3. The method of claim 1 , wherein the strain gauge sensor wires comprise a material selected from the group consisting of: an electrically conductive paste, a metal, a metal alloy, a doped semiconductor material, and combinations thereof.
4. The method of claim 1 , wherein the depositing further comprises:
printing the strain gauge sensor wires on the substrates.
5. The method of claim 1 , wherein each of the substrates comprises:
a cover film; and
a backing film attached to the cover film by an adhesive layer.
6. The method of claim 5 , wherein the cover film comprises a release film coated with a release agent.
7. The method of claim 5 , wherein the backing film comprises a material selected from the group consisting of: polyurethane, polyester, polyimide, and combinations thereof.
8. The method of claim 5 , wherein the adhesive layer comprises an adhesive selected from the group consisting of: an acrylate adhesive, an acrylic adhesive, and combinations thereof.
9. The method of claim 8 , wherein the adhesive layer comprises cyanoacrylate glue.
10. The method of claim 1 , wherein the stacked strain gauge sensor has a footprint with dimensions of less than or equal to 15 mm×15 mm.
11. The method of claim 1 , wherein the stacked strain gauge sensor is configured to fit on a body surface.
12. The method of claim 11 , wherein the stacked strain gauge sensor is attachable to the body surface with an adhesive.
13. The method of claim 11 , wherein the body surface comprises a fingernail.