Self-aligned edge passivation for robust resistive random access memory connection
A resistive random access memory (RRAM) structure includes top and bottom electrodes electrically coupled with first and second metal connection lines, respectively, the first and second metal connection lines providing electrical connection to the RRAM structure. A layer of resistive switching material is disposed between the top and bottom electrodes of the RRAM structure. The resistive switching material exhibits a measurable change in resistance under influence of at least an electric field and/or heat. Dielectric spacers are formed on sidewalls of at least the bottom electrode of the RRAM structure. The RRAM structure further includes a passivation layer formed on an upper surface of the dielectric spacers and covering at least a portion of sidewalls of the top electrode. The passivation layer is self-aligned with the first metal connection line.
1. A resistive random access memory (RRAM) structure, comprising:
top and bottom electrodes electrically coupled with first and second metal connection lines, respectively, the first and second metal connection lines providing electrical connection to the RRAM structure;
a layer of resistive switching material disposed between the top and bottom electrodes, the resistive switching material exhibiting a measurable change in resistance under influence of at least one of an electric field and heat;
dielectric spacers formed on sidewalls of at least the bottom electrode;
a passivation layer formed on an upper surface of the dielectric spacers and covering at least a portion of sidewalls of the top electrode, the passivation layer being self-aligned with the first metal connection line.
2. The RRAM structure of claim 1 , wherein at least one of the top and bottom electrodes comprises a multiple-layer electrode.
3. The RRAM structure of claim 2 , wherein at least one of the top and bottom electrodes comprises a first metal nitride layer and at least one of a second metal nitride layer and a first metal layer formed on an upper surface of the first metal nitride layer.
4. The RRAM structure of claim 3 , wherein one of the first and second metal nitride layers comprises titanium nitride and another of the first and second metal nitride layers comprises tantalum nitride.
5. The RRAM structure of claim 3 , wherein the first metal layer comprises at least one of tungsten and iridium.
6. The RRAM structure of claim 1 , wherein an upper surface of the passivation layer is self-aligned with a bottom surface of the first metal connection line.
7. The RRAM structure of claim 1 , wherein the layer of resistive switching material comprises hafnium oxide.
8. The RRAM structure of claim 1 , wherein the passivation layer comprises at least one of silicon carbide, silicon dioxide, and silicon carbonate.
9. The RRAM structure of claim 1 , wherein the passivation layer comprises a conformal dielectric liner.
10. The RRAM structure of claim 1 , wherein the passivation layer comprises an electrically conductive material, and wherein the dielectric spacers are formed on sidewalls of the layer of resistive switching material and bottom electrode and are configured to electrically isolate the resistive switching material and bottom electrode from the passivation layer.
11. The RRAM structure of claim 10 , wherein the passivation layer is electrically connected with the top electrode.
12. The RRAM structure of claim 1 , wherein an overall width of the top and bottom electrodes and resistive switching layer is less than a width of the first metal connection line, to thereby enable scaling of the RRAM structure to a size that is less than a size of the first metal connection line.