Gyro sensor, electronic device, and vehicle
View Patent ↗A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.
1. A gyro sensor comprising:
a substrate;
a fixed section fixed to the substrate;
a mass section displaced along a first axis parallel to a principal plane of the substrate;
a driving section configured to drive the mass section along the first axis;
a detecting section coupled to the mass section, configured to turn around a second axis crossing the first axis, and configured to be displaced along the second axis by a Coriolis force acting on a turning motion horizontal to the substrate; and
an elastic section coupling the detecting section and the fixed section, wherein
the fixed section is disposed between a center of gravity of the detecting section and the mass section in a plan view.
2. The gyro sensor according to claim 1 , wherein the fixed section is disposed between the elastic section and the mass section.
3. The gyro sensor according to claim 1 , wherein a joining section extending along a third axis, which crosses the first axis and the second axis, from the detecting section and joining the elastic section and the detecting section is disposed between the center of gravity of the detecting section and the mass section.
4. The gyro sensor according to claim 1 , wherein the detecting section includes a groove disposed in a position closer to the elastic section than an end portion at an opposite side of the mass section side of the detecting section.
5. The gyro sensor according to claim 4 , wherein the groove is disposed in a position where a center in the first axis direction of the groove does not overlap an extended line along the third axis passing a center in the first axis direction of the joining section.
6. A gyro sensor comprising:
a substrate;
a mass section displaced along a first axis parallel to a principal plane of the substrate;
a driving section configured to drive the mass section along the first axis;
a fixed section fixed to the substrate;
a first detecting section disposed in a first direction along a second axis crossing the first axis of the fixed section, coupled to the mass section, configured to turn around a third axis crossing the first axis and the second axis, and configured to be displaced along the third axis by a Coriolis force acting on a turning motion horizontal to the substrate;
a second detecting section disposed in a second direction opposite to the first direction of the fixed section, coupled to the mass section, configured to turn around the third axis, and configured to be displaced in an opposite phase to the first detecting section along the third axis by the Coriolis force acting on the turning motion horizontal to the substrate;
a first elastic section coupling the first detecting section and the fixed section; and
a second elastic section coupling the second detecting section and the fixed section, wherein
the fixed section is disposed between an imaginary line connecting a center of gravity of the first detecting section and a center of gravity of the second detecting section and the mass section in a plan view.
7. An electronic device comprising the gyro sensor according to claim 1 .
8. A vehicle comprising the gyro sensor according to claim 1 .