Interconnect structures of three-dimensional memory devices
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack, a channel structure, and a slit structure. The memory stack includes interleaved conductive layers and dielectric layers above the substrate. The channel structure extends vertically through the memory stack. The slit structure extends vertically through the memory stack. An upper end of the slit structure is above an upper end of the channel structure.
1. A three-dimensional (3D) memory device, comprising:
a memory stack comprising interleaved conductive layers and dielectric layers;
a channel structure extending vertically through the memory stack;
a single local contact layer on the memory stack and comprising a channel local contact above and in contact with an upper end of the channel structure; and
a slit structure extending vertically through the memory stack and the single local contact layer,
wherein an upper end of the slit structure is flush with an upper end of the channel local contact, and
the slit structure comprises a source conductive layer that comprises polysilicon in a lower portion and a metal in an upper portion.
2. The 3D memory device of claim 1 , further comprising a first interconnect layer on the single local contact layer, wherein the first interconnect layer comprises a channel contact above and in contact with the channel local contact.
3. The 3D memory device of claim 2 , further comprising a second interconnect layer on the first interconnect layer, wherein the second interconnect layer comprises a bit line above and in contact with the channel contact.
4. The 3D memory device of claim 3 , wherein
the upper end of the slit structure is flush with an upper end of the single local contact layer; and
the first interconnect layer further comprises a slit contact above and in contact with the upper end of the slit structure.
5. The 3D memory device of claim 4 , wherein the second interconnect layer further comprises a source line above and in contact with the upper end of the slit contact.
6. The 3D memory device of claim 5 , wherein the slit structure comprises:
a source conductive layer in contact with the slit contact at the upper end of the slit structure; and
a spacer between the source conductive layer and the conductive layers of the memory stack.
7. The 3D memory device of claim 1 , wherein the channel structure comprises a semiconductor channel and a memory film.
8. The 3D memory device of claim 1 , wherein the channel structure further comprises a plug at the upper end of the channel structure and in contact with the channel local contact.
9. The 3D memory device of claim 1 , wherein the metal comprises at least one of tungsten, cobalt, aluminum, or silicides.
10. The 3D memory device of claim 1 , wherein the channel local contact comprises Cu, Al, W, Co, silicides, or a combination thereof.
11. The 3D memory device of claim 1 , wherein the single local contact layer comprises silicon oxide, silicon nitride, silicon oxynitride, low dielectric constant (low-k) dielectrics, or a combination thereof.