IP Library Granted Patent US 11,205,937
Granted Patent B2
US 11,205,937 · App. 16/038,385 · Granted Dec 21, 2021

Driving system having reduced vibration transmission

Inventors: Keng Yew Song (Singapore, SG); Ka Shing Kwan (Singapore, SG); Yue Zhang (Singapore, SG); Xiao Liang Chen (Singapore, SG); Chu Fan Feng (Singapore, SG)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
H02K5/24H01L24/78H02K41/0354H01L2224/78735H02K2201/18
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Quick Facts
Patent No.
US 11,205,937
App. No.
16/038,385
Granted
Dec 21, 2021
Kind
B2
Abstract

A driving system has a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions. A pivotal support is located between the driving motor body and a machine base for supporting the driving motor body on the machine base. The pivotal support causes at least a portion of the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object, so as to reduce vibration transmission to the machine base.

Claims (18)

1. A driving system for reducing vibration transmission from a driving motor to a machine base, the driving system comprising:

a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions;

a pivotal support for supporting the driving motor body, the pivotal support being located between the driving motor body and the machine base; wherein the pivotal support is operative to cause at least a portion of

the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object.

2. The driving system as claimed in claim 1 , wherein the pivotal support comprises a resilient structure.

3. The driving system as claimed in claim 2 , wherein the resilient structure comprises one or more leaf springs.

4. The driving system as claimed in claim 3 , wherein the resilient structure comprises a pair of leaf springs that intersect each other at a rotational pivot point that allows the at least a portion of the driving motor body to rotate relative to the machine base about the rotational pivot point.

5. The driving system as claimed in claim 3 , wherein a rotational pivot point of the resilient support is a virtual rotational pivot point that allows the at least a portion of the driving motor body to rotate relative to the machine base about the virtual pivot point.

6. The driving system as claimed in claim 5 , wherein the one or more leaf springs form a “V” shape, with a base of such “V” shape located at the machine base.

7. The driving system as claimed in claim 3 , wherein a rotational pivot point of the resilient support is an infinite pivot point that allows the at least a portion of the driving motor body to rotate relative to the machine base about the infinite pivot point.

8. The driving system as claimed in claim 7 , wherein the resilient structure comprises a pair of vertically-arranged leaf springs connecting respective points on the at least a portion of the driving motor body to corresponding positions on the machine base.

9. The driving system as claimed in claim 3 , wherein the resilient structure comprises a single leaf spring on which the at least a portion of the driving motor body is arranged to hang.

10. The driving system as claimed in claim 3 , wherein the resilient structure comprises one or more leaf springs with an “S”-shaped cross-section.

11. The driving system as claimed in claim 1 , wherein the driving motor body comprises a motor driving coil and a motor driving magnet, which are arranged with sufficient space between the motor driving coil and a motor driving magnet in order to maintain a gap between them during rotational motion of the at least a portion of the driving motor body.

12. The driving system as claimed in claim 11 , wherein the object is connected to either the motor driving coil or the motor driving magnet for driving the object to move.

13. The driving system as claimed in claim 1 , wherein the driving force causes a pull force to be generated in a direction towards a rotational pivot point to maintain rotational motion of the at least a portion of the driving motor body.

14. The driving system as claimed in claim 13 , wherein the pull force is directed primarily in a direction of the machine base.

15. The driving system as claimed in claim 1 , wherein the object is a bond head of a wire bonder.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 18, 2018
From: SONG, KENG YEW; KWAN, KA SHING; ZHANG, YUE; CHEN, XIAO LIANG; FENG, CHU FAN
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 046384/0071 →
Continuity (1)
Related Publication 20200028407A1 · Jan 23, 2020
Cited By (3)
US 12,407,199 US 12,463,517 US 12,470,118