Semiconductor device and method for manufacturing the same

1. A semiconductor device, comprising:

a first electrode;

a second electrode;

a third electrode, a position of the third electrode in a first direction being between a position of the first electrode in the first direction and a position of the second electrode in the first direction, the first direction being from the first electrode toward the second electrode;

a first semiconductor layer including Al x1 Ga 1-x1 N (0≤x1<1) and including a first partial region, a second partial region, and a third partial region, a second direction from the first partial region toward the first electrode crossing the first direction, a direction from the second partial region toward the second electrode being aligned with the second direction, a direction from the third partial region toward the third electrode being aligned with the second direction;

a second semiconductor layer including Al x2 Ga 1-x2 N (0<x2≤1 and x1<x2), a portion of the second semiconductor layer being between the third partial region and the third electrode in the second direction; and

a first insulating layer including a first insulating region, the first insulating region being between the third electrode and the portion of the second semiconductor layer in the second direction,

a concentration of hydrogen in the third partial region being less than 1/10 of a concentration of magnesium in the third partial region.

2. The device according to claim 1 , wherein the concentration of magnesium in the third partial region is less than 1×10 18 /cm 3 .

3. The device according to claim 1 , wherein the concentration of hydrogen in the third partial region is less than 1×10 17 /cm 3 .

4. The device according to claim 1 , wherein the concentration of hydrogen in the third partial region is greater than 1×10 14 /cm 3 .

5. The device according to claim 1 , wherein a concentration of magnesium in the portion of the second semiconductor layer is lower than the concentration of magnesium in the third partial region.

6. The device according to claim 5 , wherein a concentration of hydrogen in the portion of the second semiconductor layer is lower than the concentration of magnesium in the portion of the second semiconductor layer.

7. The device according to claim 1 , wherein a concentration of hydrogen in the portion of the second semiconductor layer is lower than the concentration of hydrogen in the third partial region.

8. The device according to claim 1 , further comprising an intermediate region provided between the first insulating region and the portion of the second semiconductor layer,

the intermediate region including silicon and nitrogen.

9. The device according to claim 8 , wherein a thickness along the second direction of the intermediate region is not less than 1 nm and not more than 5 nm.

10. The device according to claim 1 , wherein

the first semiconductor layer further includes a fourth partial region and a fifth partial region,

the fourth partial region is between the first partial region and the third partial region in the first direction,

the fifth partial region is between the third partial region and the second partial region in the first direction,

the second semiconductor layer further includes a first semiconductor region and a second semiconductor region,

a direction from the fourth partial region toward the first semiconductor region is aligned with the second direction,

a direction from the fifth partial region toward the second semiconductor region is aligned with the second direction, and

a concentration of hydrogen in the fourth partial region is less than 1/10 of a concentration of magnesium in the fourth partial region.

11. The device according to claim 10 , wherein the concentration of magnesium in the fourth partial region is less than 1×10 18 /cm 3 .

12. The device according to claim 10 , wherein the concentration of hydrogen in the fourth partial region is less than 1×10 17 /cm 3 .

13. The device according to claim 10 , further comprising an intermediate region provided between the fourth partial region and the first insulating layer,

the intermediate region including silicon and nitrogen.

14. A semiconductor device, comprising:

a first electrode;

a second electrode;

a third electrode, a first direction from the third electrode toward the first electrode crossing a second direction from the second electrode toward the third electrode;

a first semiconductor layer including Al x1 Ga 1-x1 N (0≤x1<1), a direction from the third electrode toward the first semiconductor layer being aligned with the first direction, a direction from the first semiconductor layer toward the first electrode being aligned with the second direction;

a second semiconductor layer including Al x2 Ga 1-x2 N (0<x2≤1 and x1<x2) and including a first semiconductor region, the first semiconductor region being between the third electrode and the first semiconductor layer in the first direction; and

a first insulating layer including a first insulating region, the first insulating region being between the third electrode and the first semiconductor region in the first direction,

a concentration of hydrogen in the first semiconductor layer being less than 1/10 of a concentration of magnesium in the first semiconductor layer.