IP Library Granted Patent US 11,214,491
Granted Patent B2
US 11,214,491 · App. 16/763,479 · Granted Jan 4, 2022

Direct graphene transfer and graphene-based devices

Inventors: Therese Francoise Arliguie (Corning, NY); Theresa Chang (Painted Post, NY); Miriam Marchena Martín-Francés (Barcelona, ES); Prantik Mazumder (Ithaca, NY); Valerio Pruneri (Barcelona, ES); Frederic Christian Wagner (Lindley, NY)
Assignees: Corning Incorporated; ICFO—THE INSTITUTE OF PHOTONIC SCIENCES; INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS (ICREA)
C01B32/194B05D1/005B05D3/12B05D2350/60B05D2505/50C01B2204/22
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Quick Facts
Patent No.
US 11,214,491
App. No.
16/763,479
Granted
Jan 4, 2022
Kind
B2
Abstract

A method of forming a functionalized device substrate is provided that includes the steps of: forming a graphene layer on a growth substrate; applying a polyimide layer to a glass, glass-ceramic or ceramic substrate, wherein a coupling agent couples the polyimide layer to the said substrate; coupling the polyimide layer to the graphene layer on the growth substrate; and peeling the growth substrate from the graphene layer.

Claims (31)

1. A method of forming a functionalized device substrate, comprising the steps of:

forming a conductive layer on a growth substrate;

applying a polymeric layer to a device substrate wherein the polymeric layer comprises a polyimide layer and, wherein a coupling agent couples the polymeric layer to the device substrate;

coupling the polymeric layer to the conductive layer on the growth substrate; and

peeling the growth substrate from the conductive layer.

2. The method of claim 1 , wherein the conductive layer comprises a graphene layer.

3. The method of claim 2 , wherein the step of forming the conductive layer comprises:

forming a graphene layer on the growth substrate, the growth substrate comprising one or more of copper, nickel, silicon carbide, germanium, silver, iron, stainless steel, sapphire, platinum, iridium, ruthenium, cobalt and a copper-nickel alloy.

4. The method of claim 1 , wherein the coupling agent comprises an aminosilane.

5. The method of claim 1 , wherein the device substrate comprises one or more of an aluminosilicate and a borosilicate glass.

6. The method of claim 1 , wherein the applying step further comprises:

heating the polymeric layer, coupling agent and device substrate to a temperature in the range from about 90° C. to about 130° C.

7. A method of forming a functionalized device substrate, comprising the steps of:

forming a graphene layer on a growth substrate;

applying a polyimide layer to a glass, glass-ceramic or ceramic substrate, wherein a coupling agent couples the polyimide layer to the glass, glass-ceramic or ceramic substrate;

coupling the polyimide layer to the graphene layer on the growth substrate; and

peeling the growth substrate from the graphene layer.

8. The method of claim 7 , wherein the step of applying the polyimide layer further comprises the step of:

mixing the coupling agent and a precursor of the polyimide and coating the glass, glass-ceramic or ceramic substrate with the coupling agent, the precursor and the polyimide layer.

9. The method of claim 7 , wherein the step of applying the polyimide layer further comprises:

applying the coupling agent to the glass, glass-ceramic or ceramic substrate; and

applying the polyimide layer to the coupling agent.

10. The method of claim 7 , wherein the applying the polyimide layer step is conducted with a spin coating process.

11. The method of claim 7 , wherein the step of coupling the polyimide layer to the graphene layer further comprises:

heating the polyimide layer at a temperature of from about 90° C. to about 180° C.

12. The method of claim 7 , wherein the step of coupling the polyimide layer to the graphene layer further comprises:

heating the polyimide layer to a temperature of from about 100° C. to about 150° C.

13. The method of claim 7 , wherein the step of coupling the polyimide layer to the graphene layer further comprises the step of:

pressing the polyimide layer to the graphene layer at a pressure of about 250 psi.

14. The method of claim 7 , wherein the step of coupling the polyimide layer to the graphene layer further comprises:

pressing the polyimide layer to the graphene layer at a pressure of from about 100 psi to about 350 psi.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 8, 2021
From: ARLIGUIE, THERESE FRANCOISE; CHANG, THERESA; MARTIN-FRANCES, MIRIAM MARCHENA; MAZUMDER, PRANTIK; PRUNERI, VALERIO; WAGNER, FREDERIC CHRISTIAN
To: CORNING INCOPORATED; ICFO - THE INSTITUTE OF PHOTONIC SCIENCES; INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS (ICREA)
Reel/Frame 056787/0767 →
Continuity (2)
Provisional Application 62587840 · Nov 17, 2017
Related Publication 20200308005A1 · Oct 1, 2020
Cited By (2)
US 12,412,786 US 12,655,059